Physical quantity measurement device

A physical quantity measurement device configured to measure a physical quantity of a fluid, the physical quantity measurement device comprising:

• a measurement flow path that is configured to cause fluid to flow therethrough;
• a physical quantity sensor that is provided in a measurement flow path and configured to detect a physical quantity of the fluid;
• a sensor support portion that supports the physical quantity sensor;
• and
• a flow path housing portion that forms the measurement flow path and supports the sensor support portion, wherein
• the sensor support portion includes
• a support tip end portion, which is one end portion provided in the measurement flow path, and
• a support front surface, which includes a front fixed portion, which is provided at a position separated from the support tip end portion and fixed to an inner surface of the flow path housing portion, the support front surface being a surface on a side where the physical quantity sensor is exposed,
• the physical quantity sensor includes
• a sensor exposure surface exposed from the support front surface, and
• a membrane portion in a film shape provided with a detection element, which is configured to detect the physical quantity of the fluid, and forming a part of the sensor exposure surface, and
• in a height direction in which the support tip end portion and the front fixed portion are arranged, the membrane portion is provided at a position closer to an exposed base end portion, which is an end portion of the sensor exposure surface on a side opposite from the support tip end portion, than the support tip end portion.

A physical quantity measurement device configured to measure a physical quantity of a fluid, the physical quantity measurement device comprising:

• a measurement flow path that is configured to cause fluid to flow therethrough;
• a physical quantity sensor that is provided in a measurement flow path and configured to detect a physical quantity of the fluid;
• a sensor support portion that supports the physical quantity sensor;
• and
• a flow path housing portion that forms the measurement flow path and supports the sensor support portion, wherein
• the sensor support portion includes
• a support tip end portion, which is one end portion provided in the measurement flow path,
• a support front surface, which includes a front fixed portion, which is provided at a position separated from the support tip end portion and fixed to an inner surface of the flow path housing portion, the support front surface being a surface on a side where the physical quantity sensor is exposed, and
• a support back surface, which includes a back fixed portion provided at a position separated from the support tip end portion and fixed to the inner surface of the flow path housing portion, the support back surface being a surface opposite from the support front surface,
• the physical quantity sensor includes a sensor exposure surface exposed from the support front surface, and
• in a height direction in which the support tip end portion and the front fixed portion are arranged, a separation distance between a front fixed base end portion, which is an end portion of the front fixed portion on a side opposite from the support tip end portion, and an exposed base end portion, which is an end portion of the sensor exposure surface on a side opposite from the support tip end portion, is different from a separation distance between a back fixed base end portion, which is an end portion of the back fixed portion on a side opposite from the support tip end portion, and the exposed base end portion.

A physical quantity measurement device configured to measure a physical quantity of a fluid, the physical quantity measurement device comprising:

• a measurement flow path that is configured to cause fluid to flow therethrough;
• a physical quantity sensor that is provided in a measurement flow path and configured to detect a physical quantity of the fluid;
• a sensor support portion that supports the physical quantity sensor;
• and
• a flow path housing portion that forms the measurement flow path and supports the sensor support portion, wherein
• the sensor support portion includes
• a support tip end portion, which is one end portion provided in the measurement flow path, and
• a support front surface, which includes a front fixed portion, which is provided at a position separated from the support tip end portion and fixed to an inner surface of the flow path housing portion, the support front surface being a surface on a side where the physical quantity sensor is exposed,
• the physical quantity sensor includes a sensor exposure surface exposed from the support front surface, and
• in a height direction in which the support tip end portion and the front fixed portion are arranged, a separation distance between a front fixed base end portion, which is an end portion of the front fixed portion on a side opposite from the support tip end portion, and an exposed base end portion, which is an end portion of the sensor exposure surface on a side opposite from the support tip end portion, is smaller than a separation distance between the exposed base end portion and the support tip end portion.