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US 11,702,761 B2Granted
Concentric flow reactor
AssigneeAlignedBio AB
InventorsGreg Alcott, Martin Magnusson, Olivier Postel, Knut Deppert, Lars Samuelson, Jonas Ohlsson
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Abstract
A gas phase nanowire growth apparatus including a reaction chamber, a first input and a second input. The first input is located concentrically within the second input and the first and second input are configured such that a second fluid delivered from the second input provides a sheath between a first fluid delivered from the first input and a wall of the reaction chamber.
Claims8
A method of fabricating semiconductor nanowires comprising:
- providing a first gas stream to a reaction chamber, wherein the first gas stream comprises a first precursor for fabricating the semiconductor nanowires;
- and
- providing a second gas stream to the reaction chamber, wherein the second gas stream forms a sheath separating the first gas stream from a wall of the reaction chamber, wherein the first gas stream has a velocity that is higher than the second gas stream to result in an expansion in a diameter of the first gas stream;
- providing nanowire growth catalyst particles;
- wherein the semiconductor nanowires comprise single crystal III-V or II-VI semiconductor nanowires.
2 more elements
Dependencies are inferred from the claim text.