US 11,700,491 B2Granted

Acoustic wave device and acoustic wave module including same

AssigneeMurata Manufacturing Co., Ltd.

InventorKoichiro Kawasaki

Life of this patent

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Abstract

An acoustic wave device includes a substrate, functional elements on a first main surface of the substrate, an outer support portion on the substrate around a region where the functional elements are disposed, a cover portion opposed to the first main surface of the substrate with the outer support portion interposed therebetween, a support portion in a hollow space defined by the substrate, the outer support portion, and the cover portion, a wiring pattern electrically connected to the functional elements, and a through electrode extending through the substrate and electrically connected to the wiring pattern. A gap is provided between the support portion and the cover portion. A distance from the first main surface of the substrate to an upper surface of the support portion is greater than a distance from the first main surface of the substrate to an upper surface of the functional elements.

Claims20

Dependent claims

An acoustic wave device comprising:

a substrate including a first main surface and a second main surface that face each other;
a plurality of functional elements on the first main surface of the substrate;
an outer support portion on the first main surface of the substrate around a region where the plurality of functional elements are disposed;
a cover portion opposed to the first main surface of the substrate with the outer support portion interposed therebetween;
a support portion in a hollow space defined by the substrate, the outer support portion, and the cover portion;
a signal terminal provided on the second main surface of the substrate;
a wiring pattern electrically connected to at least one of the plurality of functional elements;
and
at least one through electrode extending through the substrate and electrically connected to the wiring pattern;
wherein
a gap is provided between the support portion and the cover portion;
and
a distance from the first main surface of the substrate to an upper surface of the support portion is greater than a distance from the first main surface of the substrate to an upper surface of the functional elements.

10 more elements

Dependencies are inferred from the claim text.

Facts

Application: 17/980,614Filed 4 Nov 2022 · continuation
Priority: JP 2017-16661231 Aug 2017
Published: US 2023/0056515 A123 Feb 2023
Granted: 11 Jul 2023
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

H04R 17/00
Piezoelectric transducers
H04R 17/10
Piezoelectric transducers; Electrostrictive transducers: resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency
H03H 9/25
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators: constructional features of resonators using…
H04R 1/025
Casings; Cabinets ; Supports therefor; Mountings therein: arrangements for fixing loudspeaker transducers, e.g. in a box, furniture

Family

PCT/JP2018/028220Parent of this continuation · filed 27 Jul 2018
Application16/789,461Parent of this continuation · filed 13 Feb 2020
Application17/458,617Parent of this continuation · filed 27 Aug 2021
US 11,134,344 B2Parent of this continuation · filed 28 Sep 2021
US 2023/0056515 A1Pre-grant publication · published 23 Feb 2023
US 11,523,223 B2Parent of this continuation
US 2020/0186934 A1Published application
US 2021/0392440 A1Published application
US 11,700,491 B2This patent

From the US filing history. Foreign family members aren’t listed.