In-plane and out-of-plane disk resonator
AssigneePurdue Research Foundation
InventorsSunil A Bhave, Pen-Li Yu
Life of this patent
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Abstract
A piezoelectric structure is disclosed which includes a single crystal having piezoelectric coefficients d31 and d32 of opposite magnitude, such that when an alternating electric field is applied in the Z direction, the piezoelectric structure expands in one of the X and Y directions and contracts in the other of the X and Y direction, a first electrode coupled to the single crystal, and a second electrode coupled to the single crystal, wherein the alternating electric field is input to the single crystal through the first and second electrodes.
Claims18
A piezoelectric structure, comprising:
- a single crystal having piezoelectric coefficients d31 and d32 of opposite magnitude, such that when an alternating electric field is applied in the Z direction, the piezoelectric structure expands in one of the X and Y directions and contracts in the other of the X and Y direction, with substantially zero displacement in the Z-direction;
- a first electrode coupled to the single crystal;
- and
- a second electrode coupled to the single crystal, wherein the alternating electric field is input to the single crystal through the first and second electrodes, and wherein the single crystal possesses piezoelectric coefficient d31 of between about 1 pm/V and about 2500 pm/V and piezoelectric coefficient d32 of between about −1 pm/V and −3500 pm/V.
A piezoelectric structure, comprising:
- a substrate;
- a single crystal having piezoelectric coefficients d31 and d32 of opposite magnitude formed on the substrate, such that when an alternating electric field is applied in the Z direction, the piezoelectric structure expands in one of the X and Y directions and contracts in the other of the X and Y direction, thereby generating torque resulting in displacement in the Z direction;
- a first electrode coupled to the single crystal;
- and
- a second electrode coupled to the single crystal, wherein the alternating electric field is input to the single crystal through the first and second electrodes, and wherein the crystal possesses piezoelectric coefficient d31 of between about 1 pm/V and about 2500 pm/V and piezoelectric coefficient d32 of between about −1 pm/V and −3500 pm/V.
Dependencies are inferred from the claim text.