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US 11,699,985 B2Granted
Layered body, and saw device
AssigneeSumitomo Electric Industries, Ltd.
InventorsKeiichirou Geshi, Masato Hasegawa, Shigeru Nakayama
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Abstract
A ceramic substrate is formed of polycrystalline ceramic and has a supporting main surface. At the supporting main surface of the ceramic substrate, the mean of grain sizes of the polycrystalline ceramic is 15 μm or more and less than 40 μm and the standard deviation of the grain sizes is less than 1.5 times the mean.
Claims8
A layered body comprising:
- a ceramic substrate formed of polycrystalline ceramic and having a supporting main surface;
- and
- a piezoelectric substrate formed of a piezoelectric material and having a bonding main surface in contact with the supporting main surface of the ceramic substrate,
- wherein at the supporting main surface, a mean of grain sizes of the polycrystalline ceramic is 15 μm or more and less than 40 μm, and
- a standard deviation of the grain sizes is less than 1.5 times the mean.
2 more elements
Dependencies are inferred from the claim text.