Vibrator device, vibrator module, and electronic apparatus

A vibrator device comprising:

• a base having
• a semiconductor substrate composed of silicon including a first surface and a second surface in a front-back relationship with the first surface, and includes a semiconductor circuit having an active surface on the first surface side or the second surface side of the semiconductor substrate,
• a first insulating layer which is a film made of silicon oxide disposed on the first surface,
• a first internal terminal and a second internal terminal placed on the first insulating layer,
• a second insulating layer which is a film made of silicon oxide disposed on the second surface and divided into a plurality of regions including a first external terminal region and a second external terminal region separated from the first external terminal region,
• a first external terminal placed in the first external terminal region and electrically coupled to the first internal terminal, and
• a second external terminal placed in the second external terminal region and electrically coupled to the second internal terminal;
• a vibrator element placed on the first surface and electrically coupled to the first internal terminal and the second internal terminal;
• and
• a lid bonded to the first surface and housing the vibrator element between the base and itself, wherein
• the base has an insulating layer non-formation region having no insulating layer on the second surface of the semiconductor substrate,
• the semiconductor substrate has a rectangular shape in a plan view;
• the insulating layer non-formation region has a first portion disposed from a first side contained in an outer edge of the semiconductor substrate to a second side facing the first side in the plan view, and
• the first external terminal region and the second external terminal region are separated by the first portion of the insulating layer non-formation region.