Semiconductor device and semiconductor apparatus
AssigneeMitsubishi Electric Corporation
InventorsKazuya Konishi, Koichi Nishi, Akihiko Furukawa
Life of this patent
Estimating the term…
Loading patent…
AssigneeMitsubishi Electric Corporation
InventorsKazuya Konishi, Koichi Nishi, Akihiko Furukawa
Estimating the term…
A semiconductor device includes; a semiconductor substrate; an emitter electrode provided on the semiconductor substrate; a gate electrode provided on the semiconductor substrate; a drift layer of a first conduction type provided in the semiconductor substrate; a source layer of the first conduction type provided on an upper surface side of the semiconductor substrate; a base layer of a second conduction type provided on the upper surface side of the semiconductor substrate; a collector electrode provided below the semiconductor substrate; and a two-part dummy active trench including, at an upper part, an upper dummy part not connected with the gate electrode and including, at a lower part, a lower active part connected with the gate electrode and covered by an insulating film, in a trench of the semiconductor substrate, wherein a longitudinal length of the lower active part is larger than a width of the lower active part.
A semiconductor device comprising;
A semiconductor device comprising;
Dependencies are inferred from the claim text.