Semiconductor device
AssigneeUnited Microelectronics Corp.
InventorsYen-Wei Tung, Jen-Yu Wang, Cheng-Tung Huang, Yan-Jou Chen
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Abstract
A semiconductor device includes a PMOS region and a NMOS region on a substrate, a first fin-shaped structure on the PMOS region, a first single diffusion break (SDB) structure in the first fin-shaped structure, a first gate structure on the first SDB structure, and a second gate structure on the first fin-shaped structure. Preferably, the first gate structure and the second gate structure are of different materials and the first gate structure disposed directly on top of the first SDB structure is a polysilicon gate while the second gate structure disposed on the first fin-shaped structure is a metal gate in the PMOS region.
Claims6
A semiconductor device, comprising:
- a first MOS region comprising a PMOS region and a second MOS region comprising a NMOS region on a substrate:
- a first fin-shaped structure on the PMOS region, wherein the first fin-shaped structure is disposed extending along a first direction;
- a first single diffusion break (SDB) structure in the first fin-shaped structure;
- a first gate structure on the first SDB structure, wherein a length of a bottom surface of the first gate structure along the first direction is equal to a length of a top surface of the first SDB structure along the first direction;
- a second gate structure on the first fin-shaped structure, wherein the first gate structure and the second gate structure are of different materials and the first gate structure disposed directly on top of the first SDB structure is a polysilicon gate while the second gate structure disposed on the first fin-shaped structure is a metal gate in the PMOS region of the first MOS region;
- a second fin-shaped structure on the NMOS region;
- a second SDB structure in the second fin-shaped structure;
- and
- a third gate structure on the second SDB structure and a fourth gate structure on the second fin-shaped structure, wherein the third gate structure and the fourth gate structure are of same material, the third gate structure disposed directly on top of the second SDB structure is a metal gate and the fourth gate structure disposed on the second fin-shaped structure is also a metal gate in the NMOS region of the second MOS region.
Dependencies are inferred from the claim text.