Methods and apparatus for test pattern forming and film property measurement
AssigneeActive Layer Parametrics, Inc.
InventorsBulent Mehmet Basol, Jalal Ashjaee, Abhijeet Joshi
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Abstract
A method for electrically characterizing a layer disposed on a substrate and electrically insulated from the substrate is disclosed. The method can include forming a test pattern, contacting the test pattern with electrical contact elements at contact regions, and measuring an electrical parameter of the layer by passing a first set of test currents between contact regions. The test pattern can be formed by pushing a pattern forming head against a top surface of the layer, introducing a first fluid into the cavity, and converting the sacrificial portion of the layer into an insulator using the first fluid and forming the test pattern under the test-pattern-shaped inner seal.
Claims8
A test pattern generation apparatus for forming a test pattern from a layer disposed on a substrate comprising:
- a supply unit providing a fluid;
- a pattern forming head comprising a test-pattern-shaped inner seal, an outer seal, and a channel between them;
- a holder to hold the substrate;
- a first moving mechanism providing relative motion between the holder and the pattern forming head so that the pattern forming head may be pushed against a top surface of the layer to form a cavity enclosed by the channel and a sacrificial portion of the layer;
- and
- a fluid inlet configured to deliver the fluid from the supply unit to the channel to convert the sacrificial portion of the layer into an insulator, forming the test pattern.
An integrated tool for forming a test pattern from a layer disposed on a substrate and electrically characterizing the said layer, the tool comprising:
- a supply unit providing a fluid;
- a pattern forming head comprising a test-pattern-shaped inner seal, an outer seal, and a channel between them;
- a holder to hold the substrate;
- a first moving mechanism providing relative motion between the holder and the pattern forming head so that the pattern forming head may be pushed against a top surface of the layer to form a cavity enclosed by the channel and a sacrificial portion of the layer;
- a fluid inlet configured to deliver the fluid from the supply unit to the channel to convert the sacrificial portion of the layer into an insulator, forming the test pattern;
- a measurement head comprising electrical contact elements;
- and
- a second moving mechanism configured to provide relative motion between the holder and the measurement head so that the electrical contact elements may be brought into contact with the test pattern at predetermined contact regions.
Dependencies are inferred from the claim text.