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US 11,699,610 B2Granted
Rotational indexer with additional rotational axes
AssigneeLam Research Corporation
InventorsRichard M. Blank, Karl Frederick Leeser
Life of this patent
Estimating the term…
Abstract
A rotational indexer rotatable to move semiconductor wafers or other items between various stations arranged in a circular array. The items being moved may be supported by arms of the indexer during such movement. The rotational indexer may be further configured to also cause the items being moved to rotate about other rotational axes to cause rotation of the items relative to the arms supporting them.
Claims20
An apparatus comprising:
- a chamber having N processing stations located therewithin, the N processing stations arranged in a first circular array about a center axis and N being a quantity greater than or equal to two;
- a plurality of pedestals arranged in a second circular array about the center axis, each pedestal located at a respective one of the N processing stations and configured to support a semiconductor wafer during wafer processing operations performed within the chamber;
- a rotational indexer configured to transport semiconductor wafers between the pedestals of the N processing stations, the rotational indexer having:
- a first hub that is configured to be rotatable about the center axis and relative to the chamber;
- and
- N indexer arm assemblies, each indexer arm assembly including a) a wafer support and b) an indexer arm having a proximal end fixedly connected with the first hub and a distal end supporting the wafer support, wherein the wafer support of each indexer arm assembly is configured to be rotatable relative to the indexer arm of that indexer arm assembly and about a rotational axis of the wafer support, wherein the rotational axis of the wafer support is fixed in location with respect to the indexer arm of that indexer arm assembly and located at the distal end of the indexer arm of that indexer arm assembly.
3 more elements
Dependencies are inferred from the claim text.