Substrate storage apparatus, substrate storage method, and recording medium

A substrate storage apparatus comprising:

• a stage on which a cassette storing substrates is disposed, the cassette having an opening and a lid detachably mounted to the opening;
• a lid attaching/detaching plate that performs attaching/detaching of the lid to/from the opening of the cassette disposed on the stage, the lid attaching/detaching plate being provided to be movable between a mounting position in contact with the lid disposed at a position of the opening and a retracted position not in contact with the lid disposed at the position of the opening;
• a lid holding sensor that detects whether the lid is held by the lid attaching/detaching plate, the lid holding sensor including a weight sensor that measures a weight of the cassette disposed on the stage;
• and
• a controller that determines a presence/absence of an abnormality related to an attachment/detachment of the lid based on a measurement result of the weight sensor.

A substrate storage apparatus comprising:

• a stage on which a cassette storing substrates is disposed, the cassette having an opening and a lid detachably mounted to the opening;
• a lid attaching/detaching plate that performs attaching/detaching of the lid to/from the opening of the cassette disposed on the stage, the lid attaching/detaching plate being provided to be movable between a mounting position in contact with the lid disposed at a position of the opening and a retracted position not in contact with the lid disposed at the position of the opening;
• a lid holding sensor that detects whether the lid is held by the lid attaching/detaching plate, the lid holding sensor including a pressure sensor that measures an atmospheric pressure within the cassette;
• a gas supply that supplies a gas into the cassette disposed on the stage;
• and
• a controller that determines a presence/absence of an abnormality related to an attachment/detachment of the lid based on a measurement result of the pressure sensor during supply of the gas into the cassette by the gas supply or after the supply of the gas into the cassette by the gas supply.