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US 11,699,599 B2Granted
Substrate transfer apparatus and substrate treating apparatus
AssigneeSemes Co., Ltd.
InventorsByung Kyu Kim, Dukhyun Son
Life of this patent
Estimating the term…
Abstract
Disclosed is an apparatus for transferring a substrate. The apparatus includes a transfer robot, a linear rail unit including a movable plate on which the transfer robot is mounted and a running shaft on which the movable plate travels, and a particle diffusion prevention member that prevents diffusion of particles to the outside by maintaining a differential pressure between the movable plate and the running shaft.
Claims15
A substrate transfer apparatus comprising:
- a transfer robot;
- a linear rail unit including a movable plate on which the transfer robot is mounted and a running shaft on which the movable plate travels;
- and
- a particle diffusion reduction member configured to prevent diffusion of particles by maintaining a differential pressure between the movable plate and the running shaft,
- wherein the particle diffusion reduction member includes:
- a gas supply unit configured to supply an inert gas into a space between the movable plate and the running shaft;
- an exhaust port configured to suction air around the running shaft from below the running shaft;
- and
- a shielding cover member configured to prevent particles generated in the space between the movable plate and the running shaft and the inert gas supplied from the gas supply unit from diffusing to outside the shielding cover member,
- wherein the gas supply unit includes a gas supply hole facing the shielding cover member.
7 more elements
A substrate transfer apparatus comprising:
- a transfer robot;
- a linear rail unit including a movable plate on which the transfer robot is mounted and a running shaft on which the movable plate travels;
- and
- a particle diffusion reduction member configured to prevent diffusion of particles by maintaining a differential pressure between the movable plate and the running shaft,
- wherein the particle diffusion prevention member includes:
- a gas supply unit configured to supply an inert gas into a space between the movable plate and the running shaft;
- and
- an exhaust port configured to suction air around the running shaft from below the running shaft,
- wherein the article diffusion prevention member further includes:
- a shielding cover member configured to prevent particles generated in the space between the movable plate and the running shaft and the inert gas supplied from the gas su ply unit from diffusing to outside the shielding cover member,
- wherein the shielding cover member is installed with a same length as the running shaft,
- wherein the shielding cover member includes:
- a lower cover provided between the running shaft and the gas supply unit;
- and
- an upper cover configured to surround an outer side of the running shaft and a top side of the running shaft,
- wherein the lower cover and the upper cover provide a meandering as passage in the space between the movable plate and the running shaft such that the inert gas supplied from the gas supply unit is released through the exhaust port, and
- wherein the movable plate includes slots through which the lower cover and the upper cover pass.
14 more elements
A substrate transfer apparatus comprising:
- a transfer robot;
- a linear rail unit including a movable plate on which the transfer robot is mounted and a running shaft on which the movable plate travels;
- and
- a particle diffusion reduction member configured to prevent diffusion of particles by maintaining a differential pressure between the movable plate and the running shaft,
- wherein the particle diffusion prevention member includes:
- a gas supply unit configured to supply an inert gas into a space between the movable plate and the running shaft;
- and
- an exhaust port configured to suction air around the running shaft from below the running shaft,
- a shielding cover member configured to prevent particles generated in the space between the movable plate and the running shaft and the inert gas supplied from the gas supply unit from diffusing to outside the shielding cover member,
- wherein the shielding cover member is installed with a same length as the running shaft,
- wherein the shielding cover member includes:
- a lower cover provided between the running shaft and the gas supply unit;
- and
- an upper cover configured to surround an outer side of the running shaft and a top side of the running shaft,
- wherein the lower cover and the upper cover provide a meandering gas passage in the space between the movable plate and the running shaft such that the inert gas supplied from the gas supply unit is released through the exhaust port,
- wherein the movable plate includes:
- a first slot arranged in a horizontal direction from a side surface of the movable plate;
- a second slot arranged downward from an end of the first slot;
- a third slot arranged downward from any position of the first slot that is spaced apart from the second slot by a predetermined distance;
- a fourth slot arranged upward from a bottom surface of the movable plate and located between the second slot and the third slot;
- and
- an axial groove arranged on the bottom surface of the movable plate, the running shaft being inserted into the axial groove.
19 more elements
A substrate treating apparatus comprising:
- a transfer chamber having a substrate transfer space surrounded by a floor and walls;
- a transfer robot provided in the substrate transfer space;
- a movable plate on which the transfer robot is mounted;
- a linear rail on which the movable plate travels;
- a shielding cover member along the linear rail and configured to surround the linear rail;
- a gas supply port provided in the floor and configured to supply an inert gas into a space between the movable plate and the linear rail;
- and
- an exhaust port provided in the floor and configured to suction air around the linear rail from below the linear rail,
- wherein the gas supply port faces the movable plate or the shielding cover member.
6 more elements
Dependencies are inferred from the claim text.