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US 11,699,572 B2Granted
Feedback loop for controlling a pulsed voltage waveform
AssigneeApplied Materials, Inc.
InventorsLeonid Dorf, Evgeny Kamenetskiy, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov
Life of this patent
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Abstract
Embodiments of this disclosure describe a feedback loop that can be used to maintain a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate. The system described herein consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.
Claims30
A feedback loop for controlling a pulsed voltage waveform comprising a data acquisition system comprising:
- a first input channel comprising a first conditioning circuit configured to generate a first conditioned voltage waveform from a first input voltage waveform;
- and
- a fast data acquisition module comprising:
- a first acquisition channel that is electrically coupled to the first conditioning circuit of the first input channel, and is configured to generate a first digitized voltage waveform from the first conditioned voltage waveform;
- and
- a data acquisition controller configured to determine one or more waveform characteristics of the first conditioned voltage waveform by analyzing the first digitized voltage waveform, wherein the pulsed voltage waveform is established by a pulsed voltage waveform generator electrically coupled to a biasing electrode through an electrical conductor using a generator coupling assembly, and an input of the first input channel is electrically coupled an end of the generator coupling assembly.
3 more elements
A feedback loop for controlling a pulsed voltage waveform comprising a data acquisition system comprising:
- a first input channel comprising a first conditioning circuit configured to generate a first conditioned voltage waveform from a first input voltage waveform;
- a fast data acquisition module comprising:
- a first acquisition channel that is electrically coupled to the first conditioning circuit of the first input channel, and is configured to generate a first digitized voltage waveform from the first conditioned voltage waveform;
- and
- a data acquisition controller configured to determine one or more waveform characteristics of the first conditioned voltage waveform by analyzing the first digitized voltage waveform;
- and
- a feedback processor comprising a memory that includes instructions, which when executed by the feedback processor cause the feedback processor to generate one or more control parameters using the determined one or more waveform characteristics of the first conditioned voltage waveform.
4 more elements
A feedback loop for controlling a pulsed voltage waveform comprising a data acquisition system comprising:
- a first input channel comprising a first conditioning circuit configured to generate a first conditioned voltage waveform from a first input voltage waveform;
- and
- a fast data acquisition module comprising:
- a first acquisition channel that is electrically coupled to the first conditioning circuit of the first input channel, and is configured to generate a first digitized voltage waveform from the first conditioned voltage waveform;
- and
- a data acquisition controller configured to determine one or more waveform characteristics of the first conditioned voltage waveform by analyzing the first digitized voltage waveform;
- and
- a memory that includes instructions, which when executed by the fast data acquisition module cause the fast data acquisition module to at least one of:
- transmit information related to the determined one or more waveform characteristics of the first conditioned voltage waveform to a first controller;
- and
- transmit information related to the first digitized voltage waveform to a second controller.
8 more elements
A feedback loop for controlling a pulsed voltage waveform comprising a data acquisition system comprising:
- a first input channel comprising a first conditioning circuit configured to generate a first conditioned voltage waveform from a first input voltage waveform;
- a second input channel comprising a second conditioning circuit configured to generate a second conditioned voltage waveform from a second input voltage waveform;
- and
- a fast data acquisition module comprising:
- a first acquisition channel that is electrically coupled to the first conditioning circuit of the first input channel, and is configured to generate a first digitized voltage waveform from the first conditioned voltage waveform;
- a second acquisition channel that is electrically coupled to the second conditioning circuit of the second input channel, and is configured to generate a second digitized voltage waveform from the second conditioned voltage waveform;
- and
- a data acquisition controller configured to determine one or more waveform characteristics of at least one of the first and the second conditioned voltage waveforms by analyzing at least one of the first and the second digitized voltage waveforms.
5 more elements
Dependencies are inferred from the claim text.