Magnetic thin film laminated structure deposition method
AssigneeBeijing Naura Microelectronics Equipment Co., Ltd.
InventorsYujie Yang, Peijun Ding, Tongwen Zhang, Wei Xia, Hougong Wang
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Abstract
A deposition method includes depositing an adhesive layer on a workpiece to be processed and depositing a magnetic/isolated unit, where the magnetic/isolation unit includes at least one pair of a magnetic film layer and an isolation layer that are alternately disposed. The deposition method of the magnetic thin film laminated structure, the magnetic thin film laminated structure and the micro-inductive device provided by the disclosure can increase a total thickness of the magnetic thin film laminated structure, thereby broadening the application frequency range of the inductive device fabricated thereby.
Claims15
A method of forming a magnetic thin film laminated structure, the method comprising steps of:
- forming a first layer structure by:
- depositing an adhesive layer on a substance, wherein the adhesive layer is made of a material having compressive stress and comprises a Ta film, a TaN film, or a TiN film;
- depositing at least one pair of layers on the adhesive layer, each pair of the at least one pair of layers including a magnetic film layer and an isolation layer;
- and
- depositing an additional magnetic film layer on the at least one pair of layers, such that the first layer structure includes:
- the adhesive layer,
- the at least one pair of layers on the adhesive layer, and
- the additional magnetic film layer on the at least one pair of layers, and forming a second layer structure by repeating the forming of the first layer structure, which comprises:
- depositing another adhesive layer on the first layer structure, wherein the another adhesive layer is made of a material having compressive stress and comprises a Ta film, a TaN film, or a TiN film;
- depositing another at least one pair of layers on the another adhesive layer, each pair of the another at least one pair of layers including a magnetic film layer and an isolation layer;
- and
- depositing another additional magnetic film layer on the another at least one pair of layers, to form a stack of the second layer structure on the first layer structure, wherein the stack includes:
- another adhesive layer on the additional magnetic film layer of the first layer structure,
- another at least one pair of layers on another adhesive layer, and
- another additional magnetic film layer on the another at least one pair of layers.
Dependencies are inferred from the claim text.