Abnormality analysis device, abnormality analysis method, and manufacturing system

An abnormality analysis device that analyzes an abnormality in a manufacturing system that manufactures products by operating a plurality of constituent elements, the abnormality analysis device comprising:

• an overall information obtainer that obtains overall information indicating an overall feature amount of the manufacturing system;
• an overall abnormal degree calculator that calculates an overall abnormal degree that is an abnormal degree of a whole of the manufacturing system by statistically processing the overall information;
• an individual information obtainer that obtains individual information indicating a feature amount of each of the plurality of constituent elements;
• an individual abnormal degree calculator that calculates an individual abnormal degree that is an abnormal degree of each of the plurality of constituent elements by statistically processing the individual information;
• a determiner that determines whether the overall abnormal degree exceeds a first threshold value;
• and
• a decider that decides an abnormal constituent element among the plurality of constituent elements, based on a plurality of individual abnormal degrees each being the individual abnormal degree calculated by the individual abnormal degree calculator, wherein
• the individual abnormal degree calculator calculates the individual abnormal degree when the determiner determines that the overall abnormal degree exceeds the first threshold value,
• the overall abnormal degree calculator further calculates a partial abnormal degree by statistically processing partial information obtained by excluding feature amounts of the abnormal constituent element from the overall information, the partial abnormal degree being an abnormal degree of a partial system obtained by excluding the abnormal constituent element from the manufacturing system, when the overall abnormal degree is determined to exceed the first threshold value, and
• the determiner further determines whether the partial abnormal degree exceeds a second threshold value.