Light source device, illuminating apparatus, exposing apparatus, and method for manufacturing article

An illuminating apparatus comprising:

• a light source device having an LED array, wherein the LED array includes a substrate having circuits, a plurality of LED chips placed on the substrate, a first control unit, and a second control unit, and wherein a predetermined plane is illuminated with light from the LED array;
• a condensing lens;
• and
• an optical integrator,
• wherein the circuits include a first circuit and a second circuit,
• wherein the first control unit controls an amount of an electric current applied to a first group including first LED chips and second LED chips arranged in series in the first circuit, the first LED chips have a first placement angle different from a second placement angle of the second LED chips,
• wherein the second control unit controls an amount of an electric current applied to a second group including third LED chips and fourth LED chips arrangedin series in the second circuit, the third LED chips have a third placement angle different from the first placement angle and the second placement angle, the fourth LED chips have a fourth placement angle different from the first placement angle, the second placement angle and the third placement angle,
• wherein respective electric currents are flowed in the first circuit and the second circuit independently from each other,
• wherein the first control unit and the second control unit control the first circuit and the second circuit so as to make an intensity of light emitted from the LED chips in the first circuit and an intensity of light emitted from the LED chips in the second circuit different from each other, respectively, to adjust an illuminance distribution formed on the predetermined plane such that a difference in intensity is made between vertical and horizontal directions and diagonal directions, and
• wherein light intensity distributions from the plurality of LED chips are superimposed on an incident surface of the optical integrator through the condensing lens.

An exposing apparatus comprising:

• an illuminating apparatus including a light source device with an LED array including circuits, a plurality of LED chips, a first control unit and a second control unit, a condensing lens, and an optical integrator, the light source device illuminating a mask with light from the LED array;
• and
• an exposing unit configured to expose a pattern of the mask on a substrate,
• wherein the circuits include a first circuit and a second circuit,
• wherein the first control unit controls an amount of an electric current applied to a first group including first LED chips and second LED chips arranged in series in the first circuit, the first LED chips have a first placement angle different from a second placement angle of the second LED chips,
• wherein the second control unit controls an amount of an electric current applied to a second group including third LED chips and fourth LED chips arranged in series in the second circuit, the third LED chips have a third placement angle different from the first placement angle and the second placement angle, the fourth LED chips have a fourth placement angle different from the first placement angle, the second placement angle and the third placement angle,
• wherein respective electric currents are flowed in the first circuit and the second circuit independently from each other,
• wherein the first control unit and the second control unit control the first circuit and the second circuit so as to make an intensity of light emitted from the LED chips in the first circuit and an intensity of light emitted from the LED chips in the second circuit different from each other, respectively, to adjust an illuminance distribution formed on the predetermined plane such that a difference in intensity is made between vertical and horizontal directions and diagonal directions, and
• wherein light intensity distributions from the plurality of LED chips of the light source device are superimposed on an incident surface of the optical integrator through the condensing lens.

A method for manufacturing an article, comprising:

• exposing a substrate using an exposing apparatus;
• and
• developing the exposed substrate to obtain the article,
• wherein the exposing apparatus includes:
• an illuminating apparatus including a light source device, a condensing lens, and an optical integrator, the light source device having an LED array including a substrate having circuits, a plurality of LED chips placed on the substrate, a first control unit and a second control unit, the light source device illuminating a mask with light from the LED array;
• and
• an exposing unit configured to expose a pattern of the mask on the substrate,
• wherein the circuits include a first circuit and a second circuit,
• wherein the first control unit controls an amount of an electric current applied to a first group including first LED chips and second LED chips arranged in series in the first circuit, the first LED chips have a first placement angle different from a second placement angle of the second LED chips,
• wherein the second control unit controls an amount of an electric current applied to a second group including third LED chips and fourth LED chips arranged in series in the second circuit, the third LED chips have a third placement angle different from the first placement angle and the second placement angle, the fourth LED chips have a fourth placement angle different from the first placement angle, the second placement angle and the third placement angle,
• wherein respective electric currents are flowed in the first circuit and the second circuit independently from each other,
• wherein light intensity distributions from the plurality of LED chips of the light source device are superimposed on an incident surface of the optical integrator through the condensing lens, and
• wherein the first control unit and the second control unit control the first circuit and the second circuit so as to make an intensity of light emitted from the LED chips in the first circuit and an intensity of light emitted from the LED chips in the second circuit different from each other, respectively, to adjust an illuminance distribution formed on the predetermined plane such that a difference in intensity is made between vertical and horizontal directions and diagonal directions.