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US 11,698,587 B2Granted
Resist underlayer composition, and method of forming patterns using the composition
AssigneeSamsung SDI Co., Ltd.
InventorsShinhyo Bae, Soonhyung Kwon, Hyeon Park, Jaeyeol Baek, Beomjun Joo, Yoojeong Choi
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Abstract
A resist underlayer composition and a method of forming patterns using a resist underlayer composition, the resist underlayer composition including a polymer, the polymer including a structural unit that is a reaction product of an isocyanurate compound, the isocyanurate compound having at least one thiol group thereon, and a solvent.
Claims11
A resist underlayer composition, comprising:
- a polymer including a structural unit that is a reaction product of an isocyanurate compound and a compound having at least one reactive functional group, and
- a solvent,
- wherein:
- the isocyanurate compound is represented by Chemical Formula 1:
- in Chemical Formula 1, R1 to R3 are each independently a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, or a substituted or unsubstituted C1 to C30 heteroaryl group, provided that at least one of R1 to R3 includes a thiol group substituent,
- the compound having at least one reactive functional group is represented by one of the following Chemical Formula 2-1 to Chemical Formula 2-4:
- in Chemical Formulae 2-1 to 2-4,
- X1 to X4 are each independently CH2, O, or S,
- R11 to R14 are each independently a substituted or unsubstituted C1 to C6 alkenyl group,
- R15 and R16 are each independently hydrogen or a halogen atom, and
- k, l, m, n, o, p, and q are each independently an integer of 0 to 10.
8 more elements
Dependencies are inferred from the claim text.