Carrier mechanism for cleaning and handling
AssigneeApplied Materials, Inc.
InventorsBenjamin B. Riordon, Kangkang Wang
Life of this patent
Estimating the term…
Loading patent…
AssigneeApplied Materials, Inc.
InventorsBenjamin B. Riordon, Kangkang Wang
Estimating the term…
Embodiments of the present disclosure relate to a carrier mechanism for retaining optical devices. The carrier mechanism includes adjacent tray assemblies stacked such that a plurality of optical device lenses are retained therebetween. The carrier mechanism retains the plurality of optical device lenses without damaging the plurality of optical device lenses by contacting corners of the optical device lenses. The plurality of optical device lenses are retained with a plurality of support pins and a plurality of capture pins disposed in the tray assemblies. Each tray includes a plurality of openings corresponding to the plurality of optical device lenses such that fluids may contact the plurality of optical device lenses. The carrier mechanism may be utilized in multiple processing methods of the plurality of optical device lenses.
A carrier having at least two tray assemblies, each tray assembly comprising:
A carrier having at least two tray assemblies, each tray assembly comprising:
A carrier having at least two tray assemblies, each tray assembly comprising:
Dependencies are inferred from the claim text.