Probe, method of manufacturing a probe and scanning probe microscopy system

A method of manufacturing a probe for use in a scanning probe microscopy device for measuring high aspect ratio features on a surface of a substrate, the method comprising:

• providing the probe that comprises:
• a cantilever including a first end section and a second end section on an opposite side from the first end section;
• and
• a probe tip, wherein the probe tip is located at the first end section of the cantilever,
• wherein the cantilever is formed to have a longitudinal shape for enabling bending in a Z-direction perpendicular to the surface of the substrate in use, wherein the providing the probe comprises:
• forming the cantilever to comprise a neck section and a paddle section, and
• forming the probe tip to be located on the paddle section,
• wherein the neck section is formed to have a width and height in cross section thereof, and
• wherein the width and height of the neck section are dimensioned such that a vertical bending stiffness of the cantilever for bending in the Z-direction matches a lateral stiffness of the cantilever with respect to forces acting on the probe tip in a direction transverse to the Z-direction.

Scanning probe microscopy system configured for measuring high aspect ratio features on a surface of a substrate, the system comprising a probe comprising:

• a cantilever having a longitudinal shape and including a first end section and a second end section on an opposite side from the first end section;
• and
• a probe tip located at the first end section of the cantilever,
• wherein the cantilever is configured for bending in a Z-direction perpendicular to the surface of the substrate in use,
• wherein the cantilever comprises a neck section and a paddle section, wherein the probe tip is located on the paddle section, and wherein the neck section has a width and a height in a cross section thereof,
• wherein the neck section comprises a base part having a rectangular cross section,
• wherein the cantilever at least across a length of the neck section comprises a ridge extending in a direction away from the base part, such that the base part and the ridge together define the width and the height of the neck section, and
• wherein the ridge and the base part have dimensions such that a vertical bending stiffness of the cantilever for bending in the Z-direction matches a lateral stiffness of the cantilever with respect to forces acting on the probe tip in a direction transverse to the Z-direction.