Quantitative analysis method, quantitative analysis program, and X-ray fluorescence spectrometer

A non-transitory computer-readable information storage medium for storing a program for causing a computer used for an X-ray fluorescence spectrometer to execute:

• a representative composition acquisition step of acquiring a representative composition, which is a composition expressed by contents of analysis components contained in an unknown sample to be analyzed, and which is set to represent the contents of the analysis components;
• a comparative composition acquisition step of acquiring a plurality of comparative compositions, in each of which the content of one of the analysis components contained in the representative composition is changed by a predetermined content;
• a detection intensity calculation step of, assuming that a virtual sample having a thickness set in advance and being indicated by each of the representative composition and the comparative compositions has been irradiated with primary X-rays, calculating a detection intensity indicating an intensity of fluorescent X-rays detected under the influence of a geometry effect through use of a fundamental parameter method;
• and
• a matrix correction coefficient calculation step of calculating a matrix correction coefficient αj for each of the analysis components through use of a calibration curve equation expressed by:
• Wi=(bIi+c)(1+ΣαjWj);
• [Math. 1]
• Wi=(aIi2+bIi+c)(1+ΣαiWj);
• or
• Wi=bIi(1+ΣαjWi)+c, where:
• [Math. 3]
• Wi represents a mass fraction of one component “i” included in the analysis components;
• “a”, “b”, and “c” each represent a constant;
• Ii represents the detection intensity calculated for the component “i” in the detection intensity calculation step;
• αj represents the matrix correction coefficient for the component “i” with respect to a coexisting component “j”;
• and
• Wj represents a mass fraction of the coexisting component “j”,
• wherein the thickness set in advance as the thickness of the virtual sample, and a thickness of the unknown sample, are the same.

An X-ray fluorescence spectrometer, comprising:

• a representative composition acquisition module configured to acquire a representative composition, which is a composition expressed by contents of analysis components contained in an unknown sample to be analyzed, and which is set to represent the contents of the analysis components;
• a comparative composition acquisition module configured to acquire a plurality of comparative compositions, in each of which the content of one of the analysis components contained in the representative composition is changed by a predetermined content;
• a detection intensity calculation module configured to, assuming that a virtual sample having a thickness set in advance and being indicated by each of the representative composition and the comparative compositions has been irradiated with primary X-rays, calculate a detection intensity indicating an intensity of fluorescent X-rays detected under the influence of a geometry effect through use of a fundamental parameter method;
• and
• a matrix correction coefficient calculation module configured to calculate a matrix correction coefficient αj for each of the analysis components through use of a calibration curve equation expressed by:
• Wi=(bIi+c)(1+ΣαjWi);
• [Math. 1]
• Wi=(aIi2+bIi+c)(1+ΣαjWj);
• or [Math. 2]
• Wi=bI1(1+ΣαjWj)+c, where:
• [Math. 3]
• Wi represents a mass fraction of one component “i” included in the analysis components;
• “a”, “b”, and “c” each represent a constant;
• Ii represents the detection intensity calculated for the component “i” by the detection intensity calculation module;
• αj represents the matrix correction coefficient for the component “i” with respect to a coexisting component “j”;
• and
• Wj represents a mass fraction of the coexisting component “j”,
• wherein the thickness set in advance as the thickness of the virtual sample, and a thickness of the unknown sample, are the same.