Analysis method and analysis apparatus

An analysis method which uses an analysis apparatus, the analysis apparatus comprising an electron spectrometer which comprises:

• an analyzer which analyses energy of electrons emitted from a specimen by irradiating the specimen with a primary probe;
• and a detector which comprises a number of detection sections, denoted by n, arranged in an energy dispersion direction of the electrons of which the energy has been analyzed by the analyzer, the analysis method comprising:
• obtaining a number of pieces of map data, denoted by n×m, by repeating a map measurement a number of times, denoted by m, in which a number of pieces of map data equal to the number of detection sections, denoted by n, are obtained by scanning the specimen with the primary probe to detect the electrons emitted from the specimen with the electron spectrometer, while measurement energy ranges of the analyzer are varied;
• generating a spectral map in which a position on the specimen is associated with a spectrum based on the number of pieces of map data, denoted by n×m, measurement energies of the detection sections not overlapping each other in the map measurement repeated the number of times, denoted by m, and
• determining a correction coefficient for correcting a detection sensitivity of the electron spectrometer by determining a first correction coefficient for correcting intensity of a first measurement energy detected by a first detection section based on intensity data of the first measurement energy and intensity data of measurement energy of the spectrum consecutive to the first measurement energy, and determining a second correction coefficient for correcting intensity of the second measurement energy detected by the first detection section based on intensity data of the second measurement energy and intensity data of measurement energy of the spectrum consecutive to the second measurement energy, the second correction coefficient being different from the first correction coefficient, wherein the correction coefficient is determined every time when each of the measurement energies detected by the detection sections has been changed,
• wherein spectrum obtained from the spectral map includes the intensity data of the first measurement energy detected by the first detection section among the number of detection sections, denoted by n, and the intensity data of a second measurement energy which is detected by the first detection section and different from the first measurement energy.

An analysis apparatus comprising:

• an electron spectrometer comprising an analyzer which analyzes energy of electrons emitted from a specimen by irradiating the specimen with a primary probe, and a detector which comprises a number of detection sections, denoted by n, arranged in an energy dispersion direction of the electrons of which the energy has been analyzed by the analyzer;
• and
• a processing section which generates a spectral map in which a position on the specimen is associated with a spectrum based on a detection result of the electrons in the electron spectrometer,
• the processing section performing:
• processing of obtaining a number of pieces of map data, denoted by n×m, by repeating a map measurement a number of times, denoted by m, in which a number pieces of map data equal to the number of detection sections, denoted by n, are obtained by scanning the specimen with the primary probe to detect the electrons emitted from the specimen with the electron spectrometer, while measurement energy ranges of the analyzer are varied;
• processing of generating the spectral map in which the position on the specimen is associated with the spectrum based on the number of pieces of map data, denoted by n×m, the measurement energy ranges of the map measurement repeated the number of times, denote by m, not overlapping each other, and
• processing of determining a correction coefficient for correcting a detection sensitivity of the electron spectrometer by determining a first correction coefficient for correcting intensity of a first measurement energy detected by a first detection section based on intensity data of the first measurement energy and intensity data of measurement energy of the spectrum consecutive to the first measurement energy, and determining a second correction coefficient for correcting intensity of the second measurement energy detected by the first detection section based on intensity data of the second measurement energy and intensity data of measurement energy of the spectrum consecutive to the second measurement energy, the second correction coefficient being different from the first correction coefficient, wherein the correction coefficient is determined every time when each of the measurement energies detected by the detection sections has been changed,
• wherein spectrum obtained from the spectral map includes the intensity data of the first measurement energy detected by the first detection section among the number of detection sections, denoted by n, and the intensity data of a second measurement energy which is detected by the first detection section and different from the first measurement energy.

An analysis apparatus comprising:

• an electron spectrometer including an analyzer which analyzes energy of electrons emitted from a specimen by irradiating the specimen with a primary probe, and a detector which includes a number of detection sections, denoted by n, arranged in an energy dispersion direction of the electrons of which the energy has been analyzed by the analyzer;
• and
• a processing section which generates a spectral map in which a position on the specimen is associated with a spectrum based on a detection result of the electrons in the electron spectrometer,
• the processing section performing:
• processing of obtaining a number of pieces of map data, denoted by n×m, by repeating a map measurement a number of times, denoted by m, in which a number of pieces of map data equal to the number of detection sections, denoted by n, are obtained by scanning the specimen with the primary probe to detect the electrons emitted from the specimen with the electron spectrometer, while measurement energy ranges of the analyzer are varied;
• processing of generating the spectral map in which the position on the specimen is associated with the spectrum based on the n×m pieces of map data, measurement energies of the detection sections not overlapping each other in the map measurement repeated the number of times, denoted by m;
• and
• processing of determining a correction coefficient for correcting a detection sensitivity of the electron spectrometer by determining a first correction coefficient for correcting intensity of a first measurement energy detected by a first detection section based on intensity data of the first measurement energy and intensity data of measurement energy of the spectrum consecutive to the first measurement energy, and determining a second correction coefficient for correcting intensity of the second measurement energy detected by the first detection section based on intensity data of the second measurement energy and intensity data of measurement energy of the spectrum consecutive to the second measurement energy, the second correction coefficient being different from the first correction coefficient, wherein the correction coefficient is determined every time when each of the measurement energies detected by the detection sections has been changed,
• wherein spectrum obtained from the spectral map includes the intensity data of the first measurement energy detected by the first detection section among the number of detection sections, denoted by n, and the intensity data of a second measurement energy which is detected by the first detection section and different from the first measurement energy.