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US 11,698,310 B2Granted
Slotted MEMS force sensor
AssigneeNextInput, Inc.
InventorsMehrnaz Rouhi Youssefi, Julius Minglin Tsai
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Abstract
Described herein is a MEMS force sensor with stress concentration design. The stress concentration can be performed by providing slots, whether through or blind, and/or selective thinning of the substrate. The MEMS force sensor is in chip scale package with solder bumps or metal pillars and there are sensing elements formed on the sensor substrate at the stress concentrate area. The stress concentration can be realized through slots, selective thinning and a combination of both.
Claims16
A microelectromechanical system (“MEMS”) force sensor, comprising:
- a semiconductor substrate;
- at least one slot formed on the semiconductor substrate, wherein the at least one slot defines opposing ends, and wherein the at least one slot is configured to create a stress concentration region on the semiconductor substrate in proximity to at least one of the opposing ends of the at least one slot;
- and
- at least one sensing element formed on the semiconductor substrate, wherein the at least one sensing element is disposed in the stress concentration region, and wherein the at least one sensing element is configured to change an electrical characteristic in response to stress.
1 more element
Dependencies are inferred from the claim text.