Ultraviolet radiation sensor
AssigneeTower Semiconductor Ltd.
InventorsPikhay Evgeny, Yakov Roizin, Michael Yampolsky
Life of this patent
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Abstract
A UV radiation sensor that includes an area that is filled with a dielectric material, the area comprises a first portion of a first thickness and a second trench portion with dielectric of a second thickness, wherein the first thickness is smaller than the second thickness; a floating gate that comprises a first floating gate portion that is positioned above the first area portion and a second floating gate portion that is positioned above the trench portion, wherein the second floating gate portion comprises multiple segments, wherein there are one or more gaps between two or more of the multiple segments; a charging element for charging the floating gate; and a readout element for reading the floating gate.
Claims20
A UV radiation sensor, comprising:
- an area that is filled with a dielectric material, the area comprises a first portion of a first thickness and a second trench portion with dielectric of a second thickness, wherein the first thickness is smaller than the second thickness;
- a floating gate that comprises a first floating gate portion that is positioned above the first area portion and a second floating gate portion that is positioned above the trench portion, wherein the second floating gate portion comprises multiple segments, wherein there are one or more gaps between two or more of the multiple segments;
- a charging element for charging the floating gate;
- and
- a readout element for reading the floating gate.
A device comprising multiple UV radiation sensors;
- wherein each UV radiation sensor comprises an area that is filled with a dielectric material, the area comprises a first portion of a first thickness and a second trench portion with dielectric of a second thickness, wherein the first thickness is smaller than the second thickness;
- a floating gate that comprises a first floating gate portion that is positioned above the first area portion and a second floating gate portion that is positioned above the trench portion, wherein the second floating gate portion comprises multiple segments, wherein there are one or more gaps between two or more of the multiple segments;
- a charging element for charging the floating gate;
- and a readout element for reading the floating gate.
A method for sensing UV radiation, the method comprises:
- illuminating one or more UV radiation sensors with UV radiation;
- and sensing the UV radiation by the one or more UV radiation sensors;
- wherein each of the one or more UV radiation sensors comprises an area that is filled with a dielectric material, the area comprises a first portion of a first thickness and a second trench portion filled with dielectric of a second thickness, wherein the first thickness is smaller than the second thickness;
- a floating gate that comprises a first floating gate portion that is positioned above the first area portion and a second floating gate portion that is positioned above the second area portion, wherein the second floating gate portion comprises multiple segments, wherein there are one or more gaps between two or more of the multiple segments;
- a charging element for charging the floating gate;
- and a readout element for reading the floating gate.
Dependencies are inferred from the claim text.