Isotropic attenuated motion gyroscope

A microelectromechanical systems (MEMS) device, comprising:

• a substrate;
• a proof mass coupled to the substrate and configured to move along a resonator axis;
• a drive structure comprising a plurality of electrodes and configured to drive the proof mass along the resonator axis;
• a second plurality of electrodes disposed in openings of the proof mass;
• a first lever coupling the drive structure to the proof mass;
• and
• an anchor coupled to the substrate, wherein the first lever is coupled to the anchor at a pivot point a first distance away from a first end of the first lever being coupled to the drive structure and a second distance away from a second end of the first lever being coupled to the proof mass, and wherein the first distance is greater than the second distance such that displacement of the proof mass along the resonator axis is attenuated relative to displacement of the drive structure.

A gyroscope, comprising:

• a first proof mass coupled to an underlying substrate and configured to move along a resonator axis;
• a drive structure comprising a first plurality of electrodes and configured to drive the first proof mass along the resonator axis;
• a sense structure comprising a second plurality of electrodes and configured to move along a second axis perpendicular to the resonator axis;
• a first lever coupled to the drive structure at a first end of the first lever and to the first proof mass at a second end of the first lever;
• and
• a second lever coupled to the drive structure at a first end of the second lever and to the first proof mass at a second end of the second lever,
• wherein the first and second levers are coupled to the underlying substrate at respective pivot points, the respective pivot points being disposed closer to the respective second ends of the first and second levers than the respective first ends of the first and second levers, and
• a frequency of a voltage applied to the first plurality of electrodes is equal to a frequency of a voltage applied to the second plurality of electrodes.

A microelectromechanical systems (MEMS) device, comprising:

• a substrate;
• a proof mass coupled to the substrate and configured to move along a resonator axis;
• and
• a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis,
• wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.