Gyroscope with peripheral detection
AssigneeMurata Manufacturing Co., Ltd.
InventorsAnssi Blomqvist, Ville-Pekka Rytkönen
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AssigneeMurata Manufacturing Co., Ltd.
InventorsAnssi Blomqvist, Ville-Pekka Rytkönen
Estimating the term…
A gyroscope comprises four Coriolis masses arranged around a center point where a lateral axis crosses a transversal axis orthogonally in the device plane. The first and second masses are aligned on the lateral axis, and the third and fourth masses are aligned on the transversal axis. The gyroscope further comprises four pairs of elongated mass elements. The mass elements of the first pair are transversally aligned on opposite sides of the lateral axis outside of the first mass. The mass elements of the second pair are transversally aligned on opposite sides of the lateral axis outside of the second mass. The mass elements of the third pair are laterally aligned on opposite sides of the first transversal axis outside of the third mass. The mass elements of the fourth pair are laterally aligned on opposite sides of the first transversal axis outside of the fourth mass.
A microelectromechanical gyroscope comprising a first Coriolis mass quartet which in its rest position lies in a device plane and a corresponding first quartet center point which lies on a first lateral axis in the device plane,
Dependencies are inferred from the claim text.