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US 11,698,191 B2Granted
Ignition method of plasma chamber
AssigneeDelta Electronics, Inc.
InventorsKun-Han Yang, Chin-Chang Kuo, Wei-Hsun Lai
Life of this patent
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Abstract
An ignition method of a plasma chamber includes steps of: (a) starting softly an ignition voltage to a first voltage, (b) decreasing the magnitude of the ignition voltage to a second voltage after a first ignition time, (c) increasing the magnitude of the ignition voltage to the first voltage after a second ignition time, and (d) repeating the step (b) and the step (c) until the ignition is successful.
Claims7
An ignition method of a plasma chamber comprising steps of:
- (a) starting softly an ignition voltage to a first voltage, wherein the ignition voltage is a DC voltage,
- (b) decreasing a magnitude of the ignition voltage to a second voltage after a first ignition time,
- (c) increasing the magnitude of the ignition voltage to the first voltage after a second ignition time, and
- (d) repeating the step (b) and the step (c) until the ignition is successful, wherein the latter of the magnitude of the first voltage is different from the former of the magnitude of the first voltage, or the latter of the magnitude of the second voltage is different from the former of the magnitude of the second voltage;
- wherein when the ignition voltage is negative, the magnitude of the first voltage is greater than the magnitude of the second voltage.
2 more elements
An ignition method of a plasma chamber comprising steps of:
- (a′) starting softly an ignition voltage to a first voltage, wherein the ignition voltage is a sinusoidal-wave voltage,
- (b′) decreasing a magnitude of the ignition voltage to a second voltage after a first ignition time,
- (c′) increasing the magnitude of the ignition voltage to the first voltage after a second ignition time, and
- (d′) repeating the step (b′) and the step (c′) until the ignition is successful, wherein the latter of the magnitude of the first voltage is different from the former of the magnitude of the first voltage, or the latter of the magnitude of the second voltage is different from the former of the magnitude of the second voltage;
- wherein a peak-to-peak value of the first voltage is greater than a peak-to-peak value of the second voltage.
2 more elements
Dependencies are inferred from the claim text.