Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow
AssigneeIchor Systems, Inc.
InventorsStephen Carson, Randolph Treur
Life of this patent
Estimating the term…
Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal retainers may be used to retain the seals during assembly of fluid flow components into apparatus for controlling flow.
Claims11
A method of installing a fluid flow component in an apparatus for controlling flow, the method comprising:
- a) positioning a first seal into a first seal retainer to form a seal assembly;
- b) installing the seal assembly onto the fluid flow component so that the first seal is aligned with a first seal cavity of the fluid flow component, thereby forming a component assembly;
- c) positioning the component assembly atop a first substrate block of the apparatus for controlling flow so that the first seal is aligned with a first seal cavity of the first substrate block and a portion of the first seal retainer is positioned between the first substrate block and the fluid flow component;
- d) partially fastening the component assembly to the apparatus for controlling flow so that the first seal is at least partially disposed within each of the first seal cavity of the first substrate block and the first seal cavity of the fluid flow component;
- e) retracting the first seal retainer so that the first seal retainer is released from the fluid flow component and the portion of the first seal retainer is removed from between the first substrate block and the fluid flow component;
- and
- f) completely fastening the component assembly to the apparatus for controlling flow.
A method of installing a fluid flow component to an apparatus for controlling flow, the method comprising:
- a) positioning a component assembly atop a first substrate block, the component assembly comprising a fluid flow component, a first seal retainer, and a first seal retained by the first seal retainer in alignment with a first seal cavity of the fluid flow component, the component assembly positioned atop the first substrate block so that the first seal is aligned with a first seal cavity of the first substrate block;
- b) retracting the first seal retainer so that the first seal retainer is released from the fluid flow component while the first seal and the fluid flow component remain in position;
- and
- c) fastening the fluid flow component to the apparatus for controlling flow so that the first seal hermetically seals a flow path of the first substrate block to a flow path of the fluid flow component.
Dependencies are inferred from the claim text.