Multi-compartment electrochemical replenishment cell

A method of operating an electroplating system, the method comprising:

• driving a voltage through a replenish assembly, the replenish assembly comprising:
• an anolyte compartment housing anode material, the anolyte compartment having a first compartment section in which the anode material is housed and a second compartment section separated from the first compartment section by a divider, wherein the divider fluidly separates the first compartment section from the second compartment section,
• a second compartment fluidly coupled with an electroplating chamber and electrically coupled with the anolyte compartment, wherein the second compartment includes a catholyte, and
• a third compartment electrically coupled with the second compartment, the third compartment comprising an inert cathode, wherein the voltage is driven from the anode material to the inert cathode through the first compartment section of the anolyte compartment, the second compartment section of the anolyte compartment, the second compartment, and the third compartment;
• and
• providing ions of the anode material to the catholyte flowing through the second compartment.

An electroplating system comprising:

• an electroplating chamber;
• and
• a replenish assembly fluidly coupled with the electroplating chamber, the replenish assembly comprising:
• a first compartment housing anode material and an anolyte, the first compartment having a first compartment section in which the anode material is housed and a second compartment section separated from the first compartment section by a divider, wherein a fluid circuit is defined between the first compartment section and the second compartment section,
• a second compartment fluidly coupled with the electroplating chamber and electrically coupled with the first compartment, wherein the second compartment contains catholyte,
• a first ionic membrane positioned between the second compartment section of the first compartment and the second compartment,
• a third compartment electrically coupled with the second compartment, the third compartment comprising an inert cathode, wherein the third compartment comprises an acid thiefolyte, and
• a second ionic membrane positioned between the second compartment and the third compartment.