Substrate holder

A substrate holder, comprising:

• a contact assembly provided with a contact configured as an electric contact to come into contact with an outer circumferential part of a first face of a substrate, a seal member provided with a seal portion configured to cover a periphery of a leading end portion of the contact and to come into contact with the first face, and a holder body configured to hold the contact and the seal member;
• a first plate located on a second face side of the substrate and configured to hold the substrate between the contact assembly and the first plate;
• at least one first pin rigidly fixed to the holder body of the contact assembly, extended through the first plate on outside of the substrate, and provided with a locked portion located at an opposite side of the contact assembly relative to the first plate;
• a locking member placed on the opposite side of the contact assembly relative to the first plate and configured to be displaceable parallel to the first plate between a locked state and an unlocked state, the locking member engaging with the locked portion of the first pin in the locked state;
• and
• at least one first biasing member placed between the locking member and the first plate along the outer circumferential part of the substrate such as to separate the locking member and the first plate from each other and compressed between the locking member and the first plate in the locked state to bias the first plate toward the contact assembly.