Production of nanoporous films
AssigneeUniversity of Central Florida Research Foundation, Inc.
InventorsYang Yang, Kyle Marcus, Kun Liang
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Abstract
A process is provided comprising submerging a substrate in an electrochemical deposit bath having at least a metal salt and saccharin. In embodiments, the film is further treated with anodization, and in other cases chemical vapor deposition. Films are also provided formed by the disclosed processes. The films are nanoporous on at least a portion of a surface of the films. Also disclosed are electronic devices having the films disclosed, including lithium-ion batteries, storage devices, supercapacitors, electrodes, semiconductors, fuel cells, and/or combinations thereof.
Claims10
A process comprising at least partially submerging a substrate into an electrochemical deposition bath wherein a composition of the electrochemical deposition bath comprises at least a metal salt and saccharin;
- forming a deposit on the substrate;
- removing the deposit from the substrate to form a freestanding layer;
- and anodizing the freestanding layer to produce a nanoporous film;
- wherein the composition of the electrochemical deposition bath comprises one of
- (a) Co2+ in a range of 0-250 g L−1,
- Borate in a range of 0-45 g L−1,
- a citrate salt in a range of 0-30 g L−1,
- Saccharin up to 2 g L−1;
- wherein the electrochemical bath has a temperature in the range of 15-45° C., and wherein the electrochemical deposition bath comprises a salt of Co in a concentration of at least 0.001 g/L;
- and
- (b) Ni2+ in a range of 0-230 g L−1,
- Fe2+ in a range of 0-40 g L−1,
- Borate in a range of 0-50 g L−1,
- the citrate salt in a range of 0-30 g L−1,
- Saccharin up to 5 g L−1;
- wherein the electrochemical bath has a temperature in a range of 15-65° C., and wherein the electrochemical deposition bath comprises a salt of Ni and a salt of Fe each in a concentration of at least 0.001 g/L;
- and
- (c) Ni2+ in a range of 0-220 g L−1,
- Co2+ in a range of 0-155 g L−1,
- Borate in a range of 0-40 g L−1,
- Cl− in a range of 0-13 g L−1, wherein the electrochemical bath has a temperature in a range of 10-60° C., and wherein the electrochemical deposition bath comprises a salt of Ni and a salt of Co in a concentration of at least 0.001 g/L;
- and
- (d) Fe2+ in a range of 0-100 g L−1,
- Co2+ in a range of 0-200 g L−1,
- H3BO3 in a range of 0-60 g L−1,
- NaCl in a range of 0.001-50 g L−1,
- Saccharin in a range of 0.001-5 g L−1;
- wherein the electrochemical bath has a temperature in a range of 10-50° C., and wherein the electrochemical deposition bath comprises a salt of Fe and a salt of Co each in a concentration of at least 0.001 g/L;
- and
- (e) Ni2+ in a range of 0-100 g L−1,
- Fe2+ in a range of 0-100 g L−1,
- Co2+ in a range of 0-200 g L−1,
- Borate in a range of 0-60 g L−1,
- Cl− in a range of 0-50 g L−1,
- Saccharin in a range of 0-5 g L−1;
- wherein the electrochemical bath has a temperature in a range of 10-55° C., and wherein the electrochemical deposition bath comprises a salt of Ni, a salt of Fe and a salt of Co each in a concentration of at least 0.001 g/L.
Dependencies are inferred from the claim text.