Mechanism for creating vacuum in processing apparatus

An intersecting module, comprising:

• a plurality of support members arranged along a longitudinal direction;
• and
• a plurality of internal ventilating plates having a plurality of orifices,
• wherein at least one of the internal ventilating plates is positioned between two of the support members positioned adjacent to each other in the longitudinal direction, and each of the internal ventilating plates is inclined relative to a transversal direction that is perpendicular to the longitudinal direction,
• wherein the internal ventilating plates comprise a first group of internal ventilating plates and a second group of internal ventilating plates, the support members comprise a first support member, a second support member, and a third support member, the first group of internal ventilating plates is positioned between the first support member and the second support member, and the second group of internal ventilating plates is positioned between the second support member and the third support member.

An intersecting module, comprising:

• a plurality of support members arranged along a longitudinal direction;
• and
• a plurality of internal ventilating plates having a plurality of orifices and comprising a first group of internal ventilating plates and a second group of internal ventilating plates,
• wherein the support members comprise a first support member, a second support member, and a third support member, the first group of internal ventilating plates is positioned between the first support member and the second support member, and the second group of internal ventilating plates is positioned between the second support member and the third support member,
• wherein the first group of the internal ventilating plates is inclined relative to a transversal direction that is perpendicular to the longitudinal direction by a first angle, and each of the first group of the internal ventilating plates is inclined by the first angle,
• wherein the second group of the internal ventilating plates is inclined relative to the transversal direction by a second angle, and each of the second group of the internal ventilating plates is inclined by the second angle.