Silicon containing detectable compounds

A method of making a compound, or salt thereof, having the formula:

• said method comprising mixing compound A, compound B, and compound C in a reaction vessel, wherein
• compound A has the formula:
• compound B is a coupling reagent;
• compound C has the formula:
• wherein
• R1, R4, R5, R6, and R7 are independently hydrogen, halogen, —CF3, —CBr3, —CCl3, —CI3, —CHF2, —CHBr2, —CHCl2, —CHI2, —CH2F, —CH2Br, —CH2Cl, —CH2I, —OH, —NH2, —COOH, —CONH2, —SH, substituted or unsubstituted alkyl, substituted or unsubstituted heteroalkyl, substituted or unsubstituted cycloalkyl, substituted or unsubstituted heterocycloalkyl, substituted or unsubstituted aryl, or substituted or unsubstituted heteroaryl;
• R2 and R3 are independently substituted or unsubstituted alkyl, or substituted or unsubstituted heteroalkyl;
• R8 is hydrogen or a bioconjugate reactive moiety;
• R9, R10, R11, R12 are independently hydrogen, substituted or unsubstituted alkyl, or substituted or unsubstituted heteroalkyl;
• R13 is a leaving group;
• L1 and L2 are independently a bond or a covalent linker;
• R4 and R5 substituents bonded to the same nitrogen atom may optionally be joined to form a substituted or unsubstituted heterocycloalkyl, or substituted or unsubstituted heteroaryl;
• R6 and R7 substituents bonded to the same nitrogen atom may optionally be joined to form a substituted or unsubstituted heterocycloalkyl, or substituted or unsubstituted heteroaryl;
• R4 and R9 substituents may optionally be joined to form a substituted or unsubstituted heterocycloalkyl, or substituted or unsubstituted heteroaryl;
• R7 and R10 substituents may optionally be joined to form a substituted or unsubstituted heterocycloalkyl, or substituted or unsubstituted heteroaryl;
• R5 and R11 substituents may optionally be joined to form a substituted or unsubstituted heterocycloalkyl, or substituted or unsubstituted heteroaryl;
• and
• R6 and R12 substituents may optionally be joined to form a substituted or unsubstituted heterocycloalkyl, or substituted or unsubstituted heteroaryl.