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US 11,697,660 B2Granted
Process for preparing organotin compounds
AssigneeEntegris, Inc.
InventorsDavid Kuiper, David M. Ermert, Thomas Coyne
Life of this patent
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Abstract
Provided is a facile process for preparing certain organotin compounds having alkyl and alkylamino substituents. The process provides organotin precursor compounds, for example tris(dimethylamido)isopropyl tin, in a highly pure form. As such, the products of the process are particularly useful in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in microelectronic device manufacturing.
Claims14
A process for preparing a composition comprising a compound of Formula (I):
- wherein each R is independently chosen from a C1-C5 alkyl group, and R1 is chosen from a C1-C5 alkyl group, which comprises combining:
- a) a compound of Formula R1SnX3, wherein X is chosen from Cl, I, and Br,
- b) a compound of Formula Li(R)2N, and
- c) a compound of Formula and R2NH,
- wherein the compound of Formula R2NH is present in a molar excess over the compound of Formula R1SnX3.
2 more elements
Dependencies are inferred from the claim text.