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US 11,697,213 B2Granted
Radar based position measurement for robot systems
AssigneePersimmon Technologies Corporation
InventorScott Wilkas
Life of this patent
Estimating the term…
Abstract
An apparatus including at least one emitter configured to emit energy; at least one receiver configured to receive the emitted energy, where the at least one emitter is mounted on at least one of: a robot arm, an end effector of the robot arm, a substrate on the robot arm, or a substrate process module, where the at least one receiver is mounted on at least one of: the robot arm, the end effector of the robot arm, the substrate on the robot arm, or the substrate process module.
Claims20
An apparatus comprising:
- at least one emitter configured to emit energy;
- at least one receiver configured to receive the emitted energy,
- where the at least one emitter is mounted on at least one of:
- a robot arm,
- an end effector of the robot arm,
- a substrate on the robot arm, or
- a substrate process module,
- where the at least one receiver is mounted on at least one of:
- the robot arm,
- the end effector of the robot arm,
- the substrate on the robot arm, or
- the substrate process module;
- where the at least one emitter comprises a plurality of emitters, where the plurality of emitters are mounted to a chamber of the substrate process module and have respective different energy transmission directions which are towards a center substrate positioning area in the chamber.
10 more elements
A method comprising:
- mounting at least one emitter on at least one of:
- a robot arm,
- an end effector of the robot arm,
- a substrate on the robot arm, or
- a substrate process module,
- where the at least one emitter is configured to emit energy;
- mount at least one receiver on at least one of:
- the robot arm,
- the end effector of the robot arm,
- the substrate on the robot arm, or
- the substrate process module,
- where the at least one receiver is configured to receive the emitted energy;
- where the at least one emitter comprises a plurality of emitters, where the plurality of emitters are mounted to a chamber of the substrate process module and have respective different energy transmission directions which are towards a center substrate positioning area in the chamber.
10 more elements
A method comprising:
- emitting energy from an emitter,
- receiving the emitted energy by a receiver,
- where the at least one emitter is mounted on at least one of:
- a robot arm,
- an end effector of the robot arm,
- a substrate on the robot arm, or
- a substrate process module,
- where the at least one receiver is mounted on at least one of:
- the robot arm,
- the end effector of the robot arm,
- the substrate on the robot arm, or
- the substrate process module;
- based, at least partially, upon the energy received by the at least one receiver, determining:
- at least one of:
- a position, and/or range, and/or angle, and/or velocity of the substrate,
- a position, and/or range, and/or angle, and/or velocity of the robot arm, or
- a position, and/or range, and/or angle, and/or velocity of the end effector,
- relative to the substrate process module, or
- a position of the substrate on the end effector and/or the robot arm;
- where the at least one emitter comprises a plurality of emitters, where the plurality of emitters are mounted to a chamber of the substrate process module and have respective different energy transmission directions which are towards a center substrate positioning area in the chamber.
17 more elements
Dependencies are inferred from the claim text.