Piezoelectric device with orientation control layer formed of sazo and manufacturing method thereof
AssigneeNitto Denko Corporation
InventorsMasaharu Arimoto, Hironobu Machinaga, Masato Katsuda, Manami Kurose
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Abstract
A piezoelectric device has a layered structure in which at least a first electrode, a plastic layer, an orientation control layer, a piezoelectric layer, and a second electrode are stacked, wherein the orientation control layer is amorphous, and the piezoelectric layer with a thickness of 20 nm to 250 nm is provided over the orientation control layer, the piezoelectric layer having a wurtzite crystal structure, and wherein the orientation control layer and the piezoelectric layer are provided between the first electrode and the second electrode.
Claims16
A piezoelectric device comprising:
- a layered structure in which at least a first electrode, a plastic layer, an orientation control layer, a piezoelectric layer, and a second electrode are stacked,
- wherein the orientation control layer is amorphous, and the piezoelectric layer with a thickness of 20 nm to 250 nm is provided over the orientation control layer, the piezoelectric layer having a wurtzite crystal structure,
- wherein the orientation control layer and the piezoelectric layer are provided between the first electrode and the second electrode in a stacking direction, and
- wherein the orientation control layer is formed of amorphous zinc oxide as a basic component to which Al2O3 and SiOx are added.
A manufacturing method of a piezoelectric device having a layered structure in which at least a first electrode, a plastic layer, an orientation control layer, a piezoelectric layer, and a second electrode are stacked, the manufacturing method comprising:
- forming an orientation control layer in an amorphous phase on the plastic layer or on a stacking of layers including the plastic layer, and
- forming the piezoelectric layer having a wurtzite crystal structure over the orientation control layer in the amorphous phase,
- wherein the orientation control layer and the piezoelectric layer are provided between the first electrode and the second electrode in a stacking direction, and
- wherein the orientation control layer is formed of amorphous zinc oxide as a basic component to which Al2O3 and SiOx are added.
Dependencies are inferred from the claim text.