Mask assembly, apparatus for manufacturing display device, and method of manufacturing display device
AssigneeSamsung Display Co., Ltd.
InventorsJeunghoon Kim, Seungmin Jin
Life of this patent
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Abstract
According to one or more embodiments, a mask assembly includes a mask frame including an opening and a portion surrounding the opening, and a mask arranged on the mask frame and including a first region and a second region, and a deposition material is passable through the first region corresponding to the opening, and the second region is around the first region, and the first region includes deposition openings, and the second region includes dummy openings, at least some of the dummy openings including centers arranged to deviate from a straight line connecting centers of the deposition openings, and a width of each of the deposition openings is the same as a width of each of the dummy openings.
Claims32
A mask assembly comprising:
- a mask frame comprising an opening and a portion surrounding the opening;
- and
- a mask arranged and tensioned in a first direction on the mask frame and comprising a first region and a second region, wherein a deposition material is passable through the first region corresponding to the opening, and the second region is around the first region,
- wherein the first region comprises deposition openings, and
- the second region comprises dummy openings, wherein at least some of the dummy openings comprise centers arranged to deviate from a straight line extending in the first direction and connecting centers of the deposition openings, and
- a width of each of the deposition openings is the same as a width of each of the dummy openings.
A mask assembly comprising:
- a mask frame comprising an opening and a portion surrounding the opening;
- and
- a mask arranged and tensioned in a first direction on the mask frame and comprising a first region and a second region, wherein a deposition material is passable through the first region, and the second region is around the first region,
- wherein the first region comprises a plurality of first portions configured to shield the deposition material and extending in the first direction, and
- a first portion from among the plurality of first portions is connected to a second portion from among a plurality of second portions extending in a second direction crossing the first direction in the second region, and
- a width of the first portion from among the plurality of first portions is the same as a width of the second portion from among the plurality of second portions.
An apparatus for manufacturing a display device, the apparatus comprising:
- a chamber in which a substrate is positionable;
- a deposition source located inside the chamber and configured to supply a deposition material into the chamber;
- and
- a mask assembly facing the deposition source and configured to pass the deposition material therethrough towards the substrate,
- wherein the mask assembly comprises:
- a mask frame comprising an opening and a portion surrounding the opening;
- and
- a mask arranged and tensioned in a first direction on the mask frame and comprising a first region and a second region, wherein the deposition material is passable through the first region corresponding to the opening, and the second region is around the first region,
- wherein the first region comprises deposition openings, and
- the second region comprises dummy openings, wherein at least some of the dummy openings comprise centers arranged to deviate from a straight line extending in the first direction and connecting centers of the deposition openings, and
- a width of each of the deposition openings is the same as a width of each of the dummy openings.
A method of manufacturing a display device, the method comprising:
- positioning a substrate within a chamber;
- supplying a deposition material into the chamber by using a deposition source located inside the chamber;
- and
- forming an organic layer on the substrate by using the deposition material that passes through a mask assembly facing the deposition source,
- wherein the mask assembly comprises:
- a mask frame comprising an opening and a portion surrounding the opening;
- and
- a mask arranged and tensioned in a first direction on the mask frame and comprising a first region and a second region, wherein the deposition material passes through the first region corresponding to the openings, and the second region is around the first region, and
- the first region comprises deposition openings, and
- the second region comprises dummy openings, wherein at least some of the dummy openings comprise centers arranged to deviate from a straight line extending in the first direction and connecting centers of the deposition openings, and
- a width of each of the deposition openings is the same as a width of each of the dummy openings.
Dependencies are inferred from the claim text.