Organic EL display apparatus and manufacturing method therefor

A method of manufacturing an organic electro luminescent (EL) display apparatus, the method comprising:

• forming, on a substrate, a drive circuit comprising a thin film transistor;
• forming, on a surface of the drive circuit, a planarizing layer comprising an inorganic insulating layer and an organic insulating layer, and then forming, at the planarizing layer, a contact hole exposing a part of the thin film transistor;
• forming a conductor layer on an inner surface of the contact hole and a surface of the organic insulating layer;
• removing, by polishing, the conductor layer from the surface of the organic insulating layer, and then polishing, by chemical mechanical polishing (CMP), a surface of the conductor layer formed inside the contact hole and the surface of the organic insulating layer, wherein the surface of the organic insulating layer is exposed by removing the conductor layer such that the surface of the conductor layer and a surface of the planarizing layer are formed substantially on a same plane, and at least a part of a top surface of the planarizing layer and the conductor layer is formed on a planar surface with 20 nm or more and 50 nm or less in arithmetic average roughness;
• forming, on the planar surface, a first electrode to be connected to the conductor layer formed at an interior of the contact hole using a physical vapor deposition method, the first electrode having substantially a same surface roughness as that of the planar surface;
• forming an organic light emitting layer on the first electrode using a vacuum vapor deposition method such that a surface of the organic light emitting layer has substantially a same roughness as that of the first electrode, without any inclined surface due to unevenness of a light emitting surface even when viewed microscopically;
• and
• forming a second electrode on the organic light emitting layer.