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US 11,695,388 B2Granted
Elastic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKatsuya Matsumoto, Masato Nomiya
Life of this patent
Estimating the term…
Abstract
An elastic wave device includes an IDT electrode on a second main surface of an element substrate that includes a piezoelectric layer, a support layer on the second main surface and surrounding the IDT electrode, a cover member on the support layer, and routing wiring lines extending from the second main surface of the element substrate onto side surfaces of the element substrate.
Claims20
An elastic wave device that is to be mounted on a mounting substrate, the elastic wave device comprising:
- an element substrate including a first main surface that is on a mounting substrate side thereof, a second main surface that faces the first main surface, a plurality of side surfaces, including a first side surface, a second side surface, a third side surface, and a fourth side surface, that connect the first main surface and the second main surface to each other, and a piezoelectric layer;
- an IDT electrode provided on the second main surface of the element substrate;
- a support layer provided on the second main surface of the element substrate to surround the IDT electrode;
- a cover member provided on the support layer and sealing, together with the support layer and the element substrate, the IDT electrode in a hollow space;
- and
- a plurality of routing wiring lines including a first routing wiring line that extends from the second main surface of the element substrate onto the first side surface, a second routing wiring line that extends from the second main surface of the element substrate onto the second side surface, a third routing wiring line that extends from the second main surface of the element substrate onto the third side surface, and a fourth routing wiring line that extends from the second main surface of the element substrate onto the fourth side surface;
- wherein
- the first, second, third, and fourth routing wiring lines extend from the second main surface across the first, second, third, and fourth side surfaces, respectively, onto the first main surface of the element substrate and are connected to each other on the first main surface.
5 more elements
Dependencies are inferred from the claim text.