Acoustic resonator device with controlled placement of functionalization material

A micro-electrical-mechanical system (MEMS) resonator device comprising:

• a substrate;
• a bulk acoustic wave resonator structure arranged over at least a portion of the substrate, the bulk acoustic wave resonator structure comprising a piezoelectric material, a top side electrode arranged over a portion of the piezoelectric material, and a bottom side electrode arranged between the piezoelectric material and the substrate, wherein a portion of the piezoelectric material is arranged between the top side electrode and the bottom side electrode to form an active region, the top side electrode comprising an active area portion that overlaps the bottom side electrode and is coincident with the active region, the active area portion comprising an active area width, and the active area portion comprising an active area length extending perpendicular to the active area width;
• and
• at least one functionalization material arranged over at least a central portion of the top side electrode, wherein the at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of the active area length and extends a maximum width in a range of from about 50% to 100% of the active area width;
• an interface layer arranged between the top side electrode and the at least one functionalization material;
• a self-assembled monolayer arranged between the interface layer and the at least one functionalization material;
• and
• a hermeticity layer arranged between the interface layer and the top side electrode, wherein the top side electrode comprises a non-noble metal.

A fluidic device comprising:

• a micro-electrical-mechanical system (MEMS) resonator device comprising:
• a substrate;
• a bulk acoustic wave resonator structure arranged over at least a portion of the substrate, the bulk acoustic wave resonator structure comprising a piezoelectric material, a top side electrode arranged over a portion of the piezoelectric material, and a bottom side electrode arranged between the piezoelectric material and the substrate, wherein a portion of the piezoelectric material is arranged between the top side electrode and the bottom side electrode to form an active region, the top side electrode comprising an active area portion that overlaps the bottom side electrode and is coincident with the active region, the active area portion comprising an active area width, and the active area portion comprising an active area length extending perpendicular to the active area width;
• and
• at least one functionalization material arranged over at least a central portion of the top side electrode, wherein the at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of the active area length and extends a maximum width in a range of from about 50% to 100% of the active area width;
• and
• a fluidic passage containing the active region and arranged to conduct a flow of liquid to contact the at least one functionalization material, wherein the fluidic passage is arranged to conduct the flow of liquid from an inlet port upstream of the active region toward the active region in a direction that is substantially parallel to the active area length,
• wherein the length of the fluidic passage is greater than the active area length and the width of the fluidic passage is greater than the active area width.