Phase-synchronized RF power generator

A phase-synchronized RF power generator comprising:

• an RF power amplifier for amplifying an RF power signal;
• a first directional coupler for transferring part of the RF power signal amplified by the RF power amplifier as a feedback signal, and transferring rest of the RF power signal to an output terminal;
• an isolator for adjusting impedance mismatch generated by the first directional coupler, and transferring the RF power signal transferred by the first directional coupler to the output terminal;
• a second directional coupler for transferring part of the feedback signal transferred by the first directional coupler to be compared with a frequency of a reference signal provided by a crystal oscillator, and transferring rest of the feedback signal to a feedback loop;
• a digital phase shifter for adjusting a phase of the feedback signal transferred by the second directional coupler at predetermined intervals;
• an analog phase shifter for continuously adjusting the phase of the feedback signal discretely adjusted by the digital phase shifter;
• and
• a frequency comparator for comparing the frequency of the reference signal provided by the crystal oscillator with a frequency of the RF power signal transferred by the second directional coupler, and providing information on a difference to the digital phase shifter and the analog phase shifter.