Quantum dot slab-coupled optical waveguide emitters
AssigneeCisco Technology, Inc.
InventorsDominic F. Siriani, Jock T. Bovington, Matthew J. Traverso
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Abstract
An optical apparatus comprises a semiconductor substrate and a slab-coupled optical waveguide (SCOW) emitter disposed on the semiconductor substrate. The SCOW emitter comprises an optical waveguide comprising: a first region doped with a first conductivity type; a second region doped with a different, second conductivity type; and an optically active region disposed between the first region and the second region. The optically active region comprises a plurality of quantum dots.
Claims20
An optical apparatus comprising:
- a semiconductor substrate comprising silicon;
- and
- a slab-coupled optical waveguide (SCOW) emitter disposed on the semiconductor substrate, the SCOW emitter comprising an optical waveguide, the optical waveguide comprising:
- a first region doped with a first conductivity type;
- a second region doped with a different, second conductivity type;
- and
- an optically active region disposed between the first region and the second region, the optically active region comprising a plurality of quantum dots.
A method of fabricating a slab-coupled optical waveguide (SCOW) emitter, the method comprising:
- forming a first cladding layer over a semiconductor substrate comprising silicon;
- forming a first optical waveguide over the first cladding layer, wherein the first optical waveguide is doped with a first conductivity type;
- forming a plurality of quantum dots in an optically active region disposed above the first optical waveguide;
- forming a second optical waveguide over the optically active region, wherein the second optical waveguide is doped with a different, second conductivity type;
- and
- forming a second cladding layer over the second optical waveguide.
An optical system comprising:
- a photonic chip comprising:
- an optical component having a first height relative to a first surface;
- a semiconductor substrate comprising silicon and having a second surface;
- and
- a slab-coupled optical waveguide (SCOW) emitter contacting the second surface, the SCOW emitter comprising an optical waveguide having a second height relative to the second surface, the optical waveguide comprising:
- a first region doped with a first conductivity type;
- a second region doped with a different, second conductivity type;
- and
- an optically active region disposed between the first region and the second region, the optically active region comprising a plurality of quantum dots,
- wherein, when the first surface makes contact with the second surface, the optical waveguide is optically aligned with the optical component in at least one dimension.
Dependencies are inferred from the claim text.