Laser device and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating pulse laser light using a laser device;
• emitting the pulse laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture an electronic device,
• the laser device outputting pulse laser light by performing plural times of burst oscillation including first burst oscillation and second burst oscillation performed next to the first burst oscillation in accordance with a voltage command value and a trigger signal input from an external device, and including:
• a laser resonator;
• a chamber arranged on an optical path of the laser resonator;
• a pair of electrodes arranged in the chamber;
• a power source configured to apply a voltage to the electrodes;
• a storage unit configured to store a voltage value at which a pulse energy of the pulse laser light becomes a predetermined value;
• a control unit configured to set an application voltage value of the voltage applied to the electrodes as setting the application voltage value for outputting a pulse whose pulse number is equal to and larger than 1 and smaller than i based on the voltage command value and the voltage value stored in the storage unit, and setting the application voltage for outputting a pulse whose pulse number is equal to or larger than i and smaller than j based on the voltage command value and an offset value corresponding to the voltage command value, the pulse number indicating an order of the pulse among a plurality of pulses included in the pulse laser light output in one burst oscillation among the plural times of burst oscillation, where i is an integer larger than 1 and j is an integer larger than i.