Semiconductor structures having a micro-battery and methods for making the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChyi-Tsong Ni, I-Shi Wang, Yi Hsun Chiu, Ching-Hou Su
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Abstract
The present disclosure provides an embodiment of an integrated structure that includes a first electrode of a first conductive material embedded in a first semiconductor substrate; a second electrode of a second conductive material embedded in a second semiconductor substrate; and a electrolyte disposed between the first and second electrodes. The first and second semiconductor substrates are bonded together through bonding pads such that the first and second electrodes are enclosed between the first and second semiconductor substrates. The second conductive material is different from the first conductive material.
Claims20
A micro-battery structure comprising:
- a first substrate;
- a second substrate bonded with the first substrate such that a cavity is disposed between the first and second substrates;
- a first electrode disposed on the first substrate within the cavity, the first electrode including a first fin extending within the cavity towards the second substrate, the first fin having opposing sidewall surfaces and an end surface extending between the opposing sidewall surfaces and facing the second substrate;
- a second electrode disposed on the second substrate within the cavity, the second electrode having a second fin extending within the cavity towards the first substrate, the second fin having opposing sidewall surfaces and an end surface extending between the opposing sidewall surfaces and facing the first substrate, wherein one of the sidewalls of the second fin faces one of the sidewalls of the first fin;
- and
- a electrolyte disposed in the cavity between the first electrode and the second electrode.
A micro-battery structure comprising:
- a first substrate and a second substrate;
- a first electrode disposed on the first substrate and including a first and second fin, wherein a recess is defined between the first and second fin;
- a second electrode disposed on the second substrate and including a third fin extending into the recess defined between the first and second fin;
- and
- a electrolyte disposed in the recess.
The micro-battery structure 9, wherein the second electrode is formed of a different material than the first electrode.
The micro-battery structure 9, wherein the first and second substrates are bonded together by a bonding technology selected from the group consisting of an anodic bonding process, a vacuum bonding process, an adhesive bonding process, an enhanced bonding process, a plasma activation bonding process, a diffusion bonding process, an eutectic bonding process and a direct bonding process.
The micro-battery structure 9, wherein at least one the first and second substrates is formed of a semiconductor material.
The micro-battery structure 9, wherein the first substrate includes a first side facing the second substrate and a second side facing away from the first substrate, and
- wherein the first electrode extends from the first side to the second side of the first substrate.
A micro-battery structure comprising:
- a first semiconductor substrate and a second semiconductor substrate;
- a first electrode disposed directly on the first semiconductor substrate;
- a second electrode disposed directly on the second semiconductor substrate;
- a first bonding pad disposed within a trench defined by the first semiconductor substrate;
- a protruding feature of the second substrate extending towards the first semiconductor substrate;
- and
- a second bonding pad disposed directly on the protruding feature of the second substrate, wherein the protruding feature and the second bonding extend into the trench such that the first bonding pad is bonded to the second bonding pad.
Dependencies are inferred from the claim text.