Unified semiconductor devices having processor and heterogeneous memories and methods for forming the same
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsWeihua Cheng, Jun Liu
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsWeihua Cheng, Jun Liu
Estimating the term…
Embodiments of semiconductor devices and fabrication methods thereof are disclosed. In an example, a semiconductor device includes NAND memory cells and a first bonding layer including first bonding contacts. The semiconductor device also includes a second semiconductor structure including DRAM cells and a second bonding layer including second bonding contacts. The semiconductor device also includes a third semiconductor structure including a processor, SRAM cells, and a third bonding layer including third bonding contacts. The semiconductor device further includes a first bonding interface between the first and third bonding layers, and a second bonding interface between the second and third bonding layers. The first bonding contacts are in contact with a first set of the third bonding contacts at the first bonding interface. The second bonding contacts are in contact with a second set of the third bonding contacts at the second bonding interface. The first and second bonding interfaces are in a same plane.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.