Vias in composite IC chip structures
AssigneeIntel Corporation
InventorsAdel Elsherbini, Patrick Morrow, Johanna Swan, Shawna Liff, Mauro Kobrinksy, Van Le, Gerald Pasdast
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AssigneeIntel Corporation
InventorsAdel Elsherbini, Patrick Morrow, Johanna Swan, Shawna Liff, Mauro Kobrinksy, Van Le, Gerald Pasdast
Estimating the term…
A composite integrated circuit (IC) device structure comprising a host chip and a chiplet. The host chip comprises a first device layer and a first metallization layer. The chiplet comprises a second device layer and a second metallization layer that is interconnected to transistors of the second device layer. A top metallization layer comprising a plurality of first level interconnect (FLI) interfaces is over the chiplet and host chip. The chiplet is embedded between a first region of the first device layer and the top metallization layer. The first region of the first device layer is interconnected to the top metallization layer by one or more conductive vias extending through the second device layer or adjacent to an edge sidewall of the chiplet.
A method for fabricating an IC device structure, the method comprising:
A method for fabricating an IC device structure, the method comprising:
A method for fabricating an IC device structure, the method comprising:
Dependencies are inferred from the claim text.