Programmable connection segment and method of forming the same
AssigneeTokyo Electron Limited
InventorsMark I. Gardner, H. Jim Fulford, Anton J. deVilliers
Life of this patent
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AssigneeTokyo Electron Limited
InventorsMark I. Gardner, H. Jim Fulford, Anton J. deVilliers
Estimating the term…
In a semiconductor device, a device structure is positioned over a substrate, where the device structure includes devices. A wiring structure of the semiconductor device is positioned over the substrate and coupled to at least one of the devices. The wiring structure includes at least one of programmable lines and programmable vertical interconnects, where the programmable lines extend along a top surface of the substrate and the programmable vertical interconnects extend along a vertical direction perpendicular to the top surface of the substrate. The programmable lines and the programmable vertical interconnects include a programmable material having a modifiable resistivity in that the programmable lines and the programmable vertical interconnects change between being conductive and being non-conductive in responsive to a current pattern delivered to the programmable lines and the programmable vertical interconnects.
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.