Semiconductor package and method of fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsMinjung Kim, Kyoung Lim Suk, Seokhyun Lee
Life of this patent
Estimating the term…
Abstract
Disclosed are semiconductor packages and methods of fabricating the same. The semiconductor package includes a redistribution substrate that includes a chip region and an edge region around the chip region, and a semiconductor chip on the chip region of the redistribution substrate. The redistribution substrate includes a plurality of dielectric layers that are vertically stacked, a plurality of redistribution patterns on the chip region and in each of the dielectric layers, and a redistribution test pattern on the edge region and at a level the same as a level of at least one of the redistribution patterns.
Claims20
A semiconductor package, comprising:
- a redistribution substrate that includes a chip region and an edge region around the chip region;
- a semiconductor chip on the chip region of the redistribution substrate;
- and
- a plurality of connection terminals disposed between the redistribution substrate and the semiconductor chip,
- wherein the redistribution substrate includes:
- a plurality of dielectric layers that are vertically stacked;
- a plurality of redistribution patterns on the chip region and in each of the dielectric layers;
- and
- a redistribution test pattern on the edge region and at a level the same as a level of at least one of the redistribution patterns.
A semiconductor package, comprising:
- a package substrate;
- a redistribution substrate on the package substrate, the redistribution substrate having a chip region and an edge region around the chip region;
- a first semiconductor chip on the chip region of the redistribution substrate;
- a second semiconductor chip on the chip region of the redistribution substrate and spaced apart from the first semiconductor chip, the second semiconductor chip including a plurality of memory chips that are vertically stacked;
- a molding layer on the redistribution substrate, the molding layer covering the first semiconductor chip and the second semiconductor chip;
- a plurality of first connection terminals between the redistribution substrate and the first semiconductor chip and between the redistribution substrate and the second semiconductor chip;
- a plurality of second connection terminals between the package substrate and the redistribution substrate;
- and
- a thermal radiation structure on the package substrate, the thermal radiation structure covering the redistribution substrate, the first semiconductor chip, and the second semiconductor chip,
- wherein the redistribution substrate includes:
- a plurality of dielectric layers that are vertically stacked;
- a plurality of first redistribution patterns on the chip region and in each of the dielectric layers,
- wherein a second redistribution pattern on the edge region and in at least one of the dielectric layers, the second redistribution pattern having a sidewall vertically aligned with sidewalls of the dielectric layers, and
- wherein the sidewall of the second redistribution test pattern is laterally spaced apart from the first connection terminals.
A method of fabricating a semiconductor package, the method comprising:
- providing a carrier substrate that includes a plurality of chip regions and a scribe line region between the chip regions;
- forming a redistribution substrate including a plurality of redistribution layers vertically stacked on the carrier substrate, each of the redistribution layers including a dielectric layer and a plurality of redistribution patterns;
- mounting a semiconductor chip on the redistribution substrate;
- forming a molding layer that covers the semiconductor chip;
- and
- cutting the molding layer and the redistribution substrate along the scribe line region,
- wherein at least one of the redistribution layers includes:
- a plurality of redistribution test patterns on the chip region;
- and
- a plurality of test pads connected to the redistribution test patterns and provided on the scribe line region, and
- wherein forming the redistribution substrate includes performing a test process on at least one of the redistribution layers via the test pads, and
- wherein the test process is performed before the semiconductor chip is mounted on the redistribution substrate.
Dependencies are inferred from the claim text.