Apparatus, method and recording medium storing command for inspection

A method for inspecting an object, comprising:

• irradiating, by at least one first light source, illumination light to the object on a reference plane;
• capturing, by a plurality of cameras, one or more illumination images generated by the illumination light reflected from the object;
• irradiating, by at least one second light source, pattern light to the object;
• capturing, by the plurality of cameras, one or more pattern images generated by the pattern light reflected from the object;
• determining, by one or more processors, a plurality of outlines indicating edges of the object based on two or more images captured in different directions among the one or more illumination images and the one or more pattern images;
• determining, by the one or more processors, a virtual plane corresponding to an upper surface of the object based on the plurality of outlines;
• and
• determining, by the one or more processors, an angle between the virtual plane and the reference plane.

A non-transitory computer-readable recording medium storing a program to be executed on a computer, the program including commands that, when executed by one or more processors, cause the one or more processors to perform:

• determining a plurality of outlines indicating edges of an object based on two or more images captured in different directions among one or more illumination images generated by illumination light irradiated to the object on a reference plane and reflected from the object and one or more pattern images generated by the pattern light reflected from the object;
• determining a virtual plane corresponding to an upper surface of the object based on the plurality of outlines;
• and
• determining an angle between the virtual plane and the reference plane.