Charged particle beam drawing device and method of controlling charged particle beam drawing device
AssigneeJEOL Ltd.
InventorMasakazu Iwanaga
Life of this patent
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Abstract
A charged particle beam drawing device includes: a storage unit that stores a pattern generation program for generating pattern data, the pattern generation program being a program in which an instruction for specifying a type of a figure and an instruction for specifying a regular arrangement of the figure are described; an execution unit that executes the pattern generation program stored in the storage unit; and a control unit that performs drawing control based on the pattern data generated by the executed pattern generation program.
Claims3
A charged particle beam drawing device comprising:
- a storage unit that stores a pattern generation program for generating pattern data, the pattern generation program being a program in which an instruction for specifying a type of a figure and an instruction for specifying a regular arrangement of the figure are described;
- an execution unit that executes the pattern generation program stored in the storage unit;
- and
- a control unit that performs drawing control based on the pattern data generated by the executed pattern generation program,
- wherein the storage unit stores pattern data generated by converting figure data, wherein the pattern data generated by converting figure data is not generated by the pattern generation program, and
- the control unit performs drawing control based on the pattern data stored in the storage unit and the pattern data generated by the pattern generation program.
A method of controlling a charged particle beam drawing device, the method comprising:
- a storage step of storing in a storage unit a pattern generation program for generating pattern data and pattern data generated by converting figure data, wherein the pattern data generated by converting figure data is not generated by the pattern generation program, the pattern generation program being a program in which an instruction for specifying a type of a figure and an instruction for specifying a regular arrangement of the figure are described;
- an execution step of executing the pattern generation program stored in the storage unit;
- and
- a control step of performing drawing control based on the pattern data stored in the storage unit and the pattern data generated by the executed pattern generation program.
Dependencies are inferred from the claim text.