US 11,694,874 B2 · Method and system for generating a diffraction image

Abstract

Method and system for generating a diffraction image comprises acquiring multiple frames from a direct-detection detector responsive to irradiating a sample with an electron beam. Multiple diffraction peaks in the multiple frames are identified. A first dose rate of at least one diffraction peak in the identified diffraction peaks is estimated in the counting mode. If the first dose rate is not greater than a threshold dose rate, a diffraction image including the diffraction peak is generated by counting electron detection events. Values of pixels belonging to the diffraction peak are determined with a first set of counting parameter values corresponding to a first coincidence area. Values of pixels not belonging to any of the multiple diffraction peaks are determined using a second, set of counting parameter values corresponding to a second, different, coincidence area.

Claims15

Dependent claims

A method comprising:

irradiating a sample with an electron beam;
acquiring multiple frames from a detector;
identifying multiple diffraction peaks in the multiple frames;
estimating a first dose rate of at least one diffraction peak in the identified diffraction peaks in a counting mode;
and
responsive to the first dose rate not greater than a threshold dose rate, generating a diffraction image including the diffraction peak by counting electron detection events, wherein values of pixels belonging to the diffraction peak are determined using a first set of counting parameter values corresponding to a first coincidence area, values of pixels not belonging to the multiple diffraction peaks are determined using a second set of counting parameter values corresponding to a second, different, coincidence area.

3 more elements

A charged particle microscope, comprising:

an electron source for generating an electron beam;
a sample holder for positioning the sample;
a pixelated detector for receiving electrons from the sample;
and
a controller including a non-transitory memory for storing computer readable instructions, by executing the instructions with a processor, the microscope is configured to:
irradiate the sample with the electron beam;
acquire multiple frames with the detector;
estimate a first dose rate of at least a diffraction peak in the acquired frames in a counting mode;
responsive to the first dose rate not greater than a threshold dose rate, generate a diffraction image including the diffraction peak by counting electron detection events, wherein values of pixels belonging to the diffraction peak are determined using a first set of counting parameter values corresponding to a first coincidence area, and values of pixels not belonging to any of the multiple diffraction peaks are determined using a second set of counting parameter values corresponding to a second, different, coincidence area.

6 more elements

Dependencies are inferred from the claim text.

Method and system for generating a diffraction image

Life of this patent

Method and system for generating a diffraction image

Life of this patent

Abstract

Claims15